| Attributes | Values |
|---|
| rdf:type
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| Description
| - Kapitola 11 %22Nové technologie a materiály%22 v monografii Modern Sensors Handbook pojednává o MEMS, planární technologii křemíku pro integrované obvody, technologiích depozice, procesech leptání a 3-D metodách mikrofabrikace. (cs)
- The chapter 11 %22New Technologies and Materials%22 in Modern Sensors Handbook deals with MEMS, silicon planar IC technology, deposition technologies, etching processes, and 3-D microfabrication techniques.
- The chapter 11 %22New Technologies and Materials%22 in Modern Sensors Handbook deals with MEMS, silicon planar IC technology, deposition technologies, etching processes, and 3-D microfabrication techniques. (en)
|
| Title
| - New Technologies and Materials
- New Technologies and Materials (en)
- Nové technologie a materiály (cs)
|
| skos:prefLabel
| - New Technologies and Materials
- New Technologies and Materials (en)
- Nové technologie a materiály (cs)
|
| skos:notation
| - RIV/68378271:_____/07:00098740!RIV08-AV0-68378271
|
| http://linked.open.../vavai/riv/strany
| |
| http://linked.open...avai/riv/aktivita
| |
| http://linked.open...avai/riv/aktivity
| |
| http://linked.open...vai/riv/dodaniDat
| |
| http://linked.open...aciTvurceVysledku
| |
| http://linked.open.../riv/druhVysledku
| |
| http://linked.open...iv/duvernostUdaju
| |
| http://linked.open...titaPredkladatele
| |
| http://linked.open...dnocenehoVysledku
| |
| http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/07:00098740
|
| http://linked.open...riv/jazykVysledku
| |
| http://linked.open.../riv/klicovaSlova
| - new technologies; materials; MEMS (en)
|
| http://linked.open.../riv/klicoveSlovo
| |
| http://linked.open...ontrolniKodProRIV
| |
| http://linked.open...i/riv/mistoVydani
| |
| http://linked.open...i/riv/nazevZdroje
| |
| http://linked.open...in/vavai/riv/obor
| |
| http://linked.open...ichTvurcuVysledku
| |
| http://linked.open...cetTvurcuVysledku
| |
| http://linked.open...UplatneniVysledku
| |
| http://linked.open...iv/tvurceVysledku
| - Hulicius, Eduard
- Neužil, P.
- Hospodková, Alice
- Ripka, P.
- Tipek, A.
|
| http://linked.open...n/vavai/riv/zamer
| |
| number of pages
| |
| http://purl.org/ne...btex#hasPublisher
| |
| https://schema.org/isbn
| |
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