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  • Laser absorption spectroscopy of Al atoms in pulsed magnetron discharge with pure argon, argon/oxygen, and argon/methane gas mixtures is reported. Time-averaged densities and temperatures of sputtered Al atoms were extracted from the absorption signal. The measured Al density depended linearly on the pulse current and showed a small dependence on pressure.The critical oxygen gas flow was significantly higher in pulsed mode than in DC mode
  • Laser absorption spectroscopy of Al atoms in pulsed magnetron discharge with pure argon, argon/oxygen, and argon/methane gas mixtures is reported. Time-averaged densities and temperatures of sputtered Al atoms were extracted from the absorption signal. The measured Al density depended linearly on the pulse current and showed a small dependence on pressure.The critical oxygen gas flow was significantly higher in pulsed mode than in DC mode (en)
  • Byla realizována laserová absorpční spektroskopie Al atomů pulsního magnetronového výboje v čistém argonu a v plynných směsích typu argon/kyslík a argon/metan .Časově průměrné hodnoty hustoty a teploty naprašovaných Al atomů byly získány z absorpčních měření. Měřená hodnota hustoty závisí lineárně na pulsním proudu a vykazuje malou závislost na tlaku.Kritický tok kyslíku je podstatně vyšší v pulsním módu ve srovnání s DC módem (cs)
Title
  • Blue Diode Laser Absorption Spectroscopy of Pulsed Magnetron Discharge
  • Blue Diode Laser Absorption Spectroscopy of Pulsed Magnetron Discharge (en)
  • Laserová absorpční spektroskopie pulsního magnetronového výboje pomocí modré diody (cs)
skos:prefLabel
  • Blue Diode Laser Absorption Spectroscopy of Pulsed Magnetron Discharge
  • Blue Diode Laser Absorption Spectroscopy of Pulsed Magnetron Discharge (en)
  • Laserová absorpční spektroskopie pulsního magnetronového výboje pomocí modré diody (cs)
skos:notation
  • RIV/68378271:_____/06:00053681!RIV07-AV0-68378271
http://linked.open.../vavai/riv/strany
  • 8090;8094
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1QS100100563), P(GA202/05/2242), Z(AV0Z10100520), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika
  • 10B
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 467212
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/06:00053681
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • laser absorption spectroscopy; pulsed magnetron; sputtering parameters (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • JP - Japonsko
http://linked.open...ontrolniKodProRIV
  • [4CABE87BDF71]
http://linked.open...i/riv/nazevZdroje
  • Japanese Journal of Applied Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 45
http://linked.open...iv/tvurceVysledku
  • Jastrabík, Lubomír
  • Olejníček, Jiří
  • Hubička, Zdeněk
  • Hippler, R.
  • Do, H. T.
http://linked.open...n/vavai/riv/zamer
issn
  • 0021-4922
number of pages
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