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Description
  • Hranice mezi růstem amorfní a mikrokrystalické struktury tenkých křemíkových vrstev byla prokoumávána za účelem studia růstu zrn při změně parametrů plazmatické depozice (teploty substrátu, ředění silanu nebo doby depozice a tím i tlousťky vrstvy) (cs)
  • A boundary between amorphous and microcrystalline growth of silicon thin films was explored for the study of grain growth by changing parameters of plasma enhanced deposition (substrate temperature, silane dilution or deposition duration and thus the film thickness)
  • A boundary between amorphous and microcrystalline growth of silicon thin films was explored for the study of grain growth by changing parameters of plasma enhanced deposition (substrate temperature, silane dilution or deposition duration and thus the film thickness) (en)
Title
  • Characterization of grain growth, nature and role of grain boundaries in microcrystalline silicon – review of typical features
  • Characterization of grain growth, nature and role of grain boundaries in microcrystalline silicon – review of typical features (en)
  • Charakterizace růstu zrn, povahy a role hranic zrn v mikrokrystalickém křemíku – přehled typických vlastností (cs)
skos:prefLabel
  • Characterization of grain growth, nature and role of grain boundaries in microcrystalline silicon – review of typical features
  • Characterization of grain growth, nature and role of grain boundaries in microcrystalline silicon – review of typical features (en)
  • Charakterizace růstu zrn, povahy a role hranic zrn v mikrokrystalickém křemíku – přehled typických vlastností (cs)
skos:notation
  • RIV/68378271:_____/06:00040652!RIV07-AV0-68378271
http://linked.open.../vavai/riv/strany
  • 107;112
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA1010316), P(IAA1010413), P(ME 537), P(SM/300/1/03), Z(AV0Z1010914)
http://linked.open...iv/cisloPeriodika
  • -
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 468396
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/06:00040652
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • microcrystalline silicon; growth; transport; hydrogen (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV
  • [8DEC14310DF1]
http://linked.open...i/riv/nazevZdroje
  • Thin Solid Films
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 501
http://linked.open...iv/tvurceVysledku
  • Fejfar, Antonín
  • Stuchlík, Jiří
  • Kočka, Jan
  • Stuchlíková, The-Ha
  • Mates, Tomáš
http://linked.open...n/vavai/riv/zamer
issn
  • 0040-6090
number of pages
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