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Description
  • Titanium carbide films were grown using a magnetron assisted pulse laser deposition combining KrF pulsed laser deposition and DC magnetron sputtering (PLDMS). Plasma streams produced by magnetron and laser ablation were intersected on the substrate surface. Films properties were characterized by GDOES, AFM, XRD, XPS as well as by Raman spectroscopy. The adhesiojn and microhardness were also studied. Crystalline TiC films were fabricated at room temperature
  • Titanium carbide films were grown using a magnetron assisted pulse laser deposition combining KrF pulsed laser deposition and DC magnetron sputtering (PLDMS). Plasma streams produced by magnetron and laser ablation were intersected on the substrate surface. Films properties were characterized by GDOES, AFM, XRD, XPS as well as by Raman spectroscopy. The adhesiojn and microhardness were also studied. Crystalline TiC films were fabricated at room temperature (en)
  • TiC crystvy byly vytvářeny kombinací magnetronového napařování a laserové deposice. Vlastnosti vrystev byly charakterizovány metodami GDOES, AFM, XRD, XPS a Ramanovskou spektroskopii. Byla studována adheze a mikrotvrdost. Vrstvy TiC byly připraveny za pokojové teploty podložky (cs)
Title
  • KrF laser deposition combined with magnetron sputtering to grow titanium-carbide layers
  • KrF laserová depozice kombinovaná s magnetronem pro růst TiC vrystev (cs)
  • KrF laser deposition combined with magnetron sputtering to grow titanium-carbide layers (en)
skos:prefLabel
  • KrF laser deposition combined with magnetron sputtering to grow titanium-carbide layers
  • KrF laserová depozice kombinovaná s magnetronem pro růst TiC vrystev (cs)
  • KrF laser deposition combined with magnetron sputtering to grow titanium-carbide layers (en)
skos:notation
  • RIV/68378271:_____/06:00039940!RIV07-AV0-68378271
http://linked.open.../vavai/riv/strany
  • 101;105
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA1010110), P(LN00A015), Z(AV0Z1010914)
http://linked.open...iv/cisloPeriodika
  • -
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 482482
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/06:00039940
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • PLD; magnetron sputtering; hybrid deposition; TiC film (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV
  • [5C852FB3A1EC]
http://linked.open...i/riv/nazevZdroje
  • Thin Solid Films
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 506-507
http://linked.open...iv/tvurceVysledku
  • Jelínek, Miroslav
  • Kocourek, Tomáš
  • Studnička, Václav
  • Uherek, F.
  • Boháč, Petr
  • Vorlíček, Vladimír
  • Kadlec, J.
  • Čerňanský, Marian
  • Santoni, A.
http://linked.open...n/vavai/riv/zamer
issn
  • 0040-6090
number of pages
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