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rdf:type
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Description
| - The modification of semiconductors materials as Si and SiO2 by laser-generated Ge ion streams is described. Ge ions were produced by different lasers, and various ion diagnostics were used to optimize the process
- The modification of semiconductors materials as Si and SiO2 by laser-generated Ge ion streams is described. Ge ions were produced by different lasers, and various ion diagnostics were used to optimize the process (en)
- Je popsána modifikace polovodičových materiálů Si a SiO2 pomocí proudu iontů Ge generovaných laserem. Ge ionty byly generovány pomocí různých laserů a různé iontové diagnostiky byly použity k optimalizaci procesu. (cs)
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Title
| - Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials
- Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials (en)
- Charakteristiky proudu laserem produkovaných Ge iontů užívaných pro modifikaci polovodičových materiálů (cs)
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skos:prefLabel
| - Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials
- Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials (en)
- Charakteristiky proudu laserem produkovaných Ge iontů užívaných pro modifikaci polovodičových materiálů (cs)
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skos:notation
| - RIV/68378271:_____/05:00032108!RIV06-AV0-68378271
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(IAA1010405), P(LC528), Z(AV0Z10100523)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/05:00032108
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - laser ablation; ion implantation; Ge implant in Si (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - GB - Spojené království Velké Británie a Severního Irska
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Radiation Effects and Defects in Solids
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Krása, Josef
- Láska, Leoš
- Rohlena, Karel
- Torrisi, L.
- Ullschmied, Jiří
- Czarnecka, A.
- Parys, P.
- Badziak, J.
- Rosinski, M.
- Wolowski, J.
- Gammino, S.
- Mezzasalma, A.
- Boody, F. P.
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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