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Description
  • The modification of semiconductors materials as Si and SiO2 by laser-generated Ge ion streams is described. Ge ions were produced by different lasers, and various ion diagnostics were used to optimize the process
  • The modification of semiconductors materials as Si and SiO2 by laser-generated Ge ion streams is described. Ge ions were produced by different lasers, and various ion diagnostics were used to optimize the process (en)
  • Je popsána modifikace polovodičových materiálů Si a SiO2 pomocí proudu iontů Ge generovaných laserem. Ge ionty byly generovány pomocí různých laserů a různé iontové diagnostiky byly použity k optimalizaci procesu. (cs)
Title
  • Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials
  • Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials (en)
  • Charakteristiky proudu laserem produkovaných Ge iontů užívaných pro modifikaci polovodičových materiálů (cs)
skos:prefLabel
  • Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials
  • Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials (en)
  • Charakteristiky proudu laserem produkovaných Ge iontů užívaných pro modifikaci polovodičových materiálů (cs)
skos:notation
  • RIV/68378271:_____/05:00032108!RIV06-AV0-68378271
http://linked.open.../vavai/riv/strany
  • 477;482
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA1010405), P(LC528), Z(AV0Z10100523)
http://linked.open...iv/cisloPeriodika
  • 10-12
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 514993
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/05:00032108
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • laser ablation; ion implantation; Ge implant in Si (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [41ED4E34E106]
http://linked.open...i/riv/nazevZdroje
  • Radiation Effects and Defects in Solids
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 160
http://linked.open...iv/tvurceVysledku
  • Krása, Josef
  • Láska, Leoš
  • Rohlena, Karel
  • Torrisi, L.
  • Ullschmied, Jiří
  • Czarnecka, A.
  • Parys, P.
  • Badziak, J.
  • Rosinski, M.
  • Wolowski, J.
  • Gammino, S.
  • Mezzasalma, A.
  • Boody, F. P.
http://linked.open...n/vavai/riv/zamer
issn
  • 1042-0150
number of pages
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