About: Basic characteristics of the a-SiOC:H thin films prepared by PE CVD

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Hydrogenated amorphous silicon oxycarbide (a-SiOC:H) thin films were deposited on silicon wafers from vinyltriethoxysilane(VTES) precursor. The elemental comosition of thin films were studied by conventional and resonant Rutherford Bacscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA) methods. The Si, C. and O bulk content was correlated with surface one determined from analyses of the photoelectron spectra using XPS Hydrogenated amorphous silicon oxycarbide (a-SiOC:H) thin films were deposited on silicon wafers from vinyltriethoxysilane(VTES) precursor. The elemental comosition of thin films were studied by conventional and resonant Rutherford Bacscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA) methods. The Si, C. and O bulk content was correlated with surface one determined from analyses of the photoelectron spectra using XPS (en) Tenké vrstvy hydrogenovaného amorfního oxikarbidu křemíku (a-SiOC:H) byly deponovány na křemíkové podložky z prekurzoru VTES. Složení tenkých vrstev bylo studováno běžnou a resonanční metodou RBS a ERDA. Objemové koncentrace Si, C a O byly porovnány s povrchově citlivými údaji z XPS (cs)
Title	Basic characteristics of the a-SiOC:H thin films prepared by PE CVD Basic characteristics of the a-SiOC:H thin films prepared by PE CVD (en) Charakterizace tenkých vrstev a-SiOC:H připravených metodou PECVD (cs)
skos:prefLabel	Basic characteristics of the a-SiOC:H thin films prepared by PE CVD Basic characteristics of the a-SiOC:H thin films prepared by PE CVD (en) Charakterizace tenkých vrstev a-SiOC:H připravených metodou PECVD (cs)
skos:notation	RIV/68378271:_____/04:00104229!RIV/2005/AV0/A02005/N
http://linked.open.../vavai/riv/strany	C937;C942
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA104/03/0236), P(KSK1010104), P(ME 597), P(OC 527.110), Z(AV0Z1010914)
http://linked.open...iv/cisloPeriodika	Suppl. C
http://linked.open...vai/riv/dodaniDat	2005
http://linked.open...aciTvurceVysledku	Zemek, Josef
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	555847
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/04:00104229
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	vinyltriethoxysilane; thin film; PECVD (en)
http://linked.open.../riv/klicoveSlovo	PECVD thin film vinyltriethoxysilane
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[7CD4F892536A]
http://linked.open...i/riv/nazevZdroje	Czechoslovak Journal of Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Condensed matter physics and materials science http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.110 Optimised interphase in glass fibre/polyester composite system http://linked.opendata.cz/resource/domain/vavai/projekt/ME%20597
http://linked.open...UplatneniVysledku	2004
http://linked.open...v/svazekPeriodika	54
http://linked.open...iv/tvurceVysledku	Peřina, Vratislav Zemek, Josef Přikryl, R. Vaněk, J. Čech, V.
http://linked.open...n/vavai/riv/zamer	Experimentální a teoretický výzkum kondenzovaných systémů s význačnými fyzikálními vlastnostmi
issn	0011-4626
number of pages	6 (xsd:int)

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