About: Composition, structure, microhardness and residual stress of W-Ti-N films deposited by reactive magnetron sputtering.

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About: Composition, structure, microhardness and residual stress of W-Ti-N films deposited by reactive magnetron sputtering. Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	W-Ti-N films were deposited by the reactive d.c. magnetron sputtering from W-Ti(30 at.) target in a mixture of argon and nitrogen at a total pressure of 0.5 Pa onto steel and silicon substrates. W-Ti-N films were deposited by the reactive d.c. magnetron sputtering from W-Ti(30 at.) target in a mixture of argon and nitrogen at a total pressure of 0.5 Pa onto steel and silicon substrates. (en)
Title	Composition, structure, microhardness and residual stress of W-Ti-N films deposited by reactive magnetron sputtering. Composition, structure, microhardness and residual stress of W-Ti-N films deposited by reactive magnetron sputtering. (en)
skos:prefLabel	Composition, structure, microhardness and residual stress of W-Ti-N films deposited by reactive magnetron sputtering. Composition, structure, microhardness and residual stress of W-Ti-N films deposited by reactive magnetron sputtering. (en)
skos:notation	RIV/68378271:_____/02:02020141!RIV/2003/AV0/A02003/N
http://linked.open.../vavai/riv/strany	136;147
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA106/99/D086), P(GV106/96/K245), Z(AV0Z1010914), Z(MSM 235200002)
http://linked.open...iv/cisloPeriodika	N/A
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Zemek, Josef Musil, Jindřich Mišina, Martin
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	641437
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/02:02020141
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	hardness; - sputtering; - nitrides; alloys (en)
http://linked.open.../riv/klicoveSlovo	- sputtering hardness alloys - nitrides
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[F2DF07348388]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	Mass and energy analysis of the particle flow in low-temperature plasma based deposition of thin films Hard and superhard coatings prepared by unconventional plasma processes
http://linked.open...UplatneniVysledku	2002
http://linked.open...v/svazekPeriodika	408
http://linked.open...iv/tvurceVysledku	Musil, Jindřich Zemek, Josef Mišina, Martin Shaginyan, L. R. Regent, F. Britun, V. F.
http://linked.open...n/vavai/riv/zamer	Experimentální a teoretický výzkum kondenzovaných systémů s význačnými fyzikálními vlastnostmi http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20235200002
issn	0040-6090
number of pages	12 (xsd:int)

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