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Description
  • The thermal stability of nitrogen-rich amorphous carbon nitride films is investigated from room temperature up to 600oC. The films were deposited by three different methods,namely pulsed laser deposition,inductively coupled plasma chemical capour deposition with gaseous precursors and ICP-CVD utilizing transport reactions.
  • The thermal stability of nitrogen-rich amorphous carbon nitride films is investigated from room temperature up to 600oC. The films were deposited by three different methods,namely pulsed laser deposition,inductively coupled plasma chemical capour deposition with gaseous precursors and ICP-CVD utilizing transport reactions. (en)
Title
  • Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films.
  • Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films. (en)
skos:prefLabel
  • Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films.
  • Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films. (en)
skos:notation
  • RIV/68378271:_____/00:02010115!RIV/2003/AV0/A02003/N
http://linked.open.../vavai/riv/strany
  • 148;155
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(AV0Z1010914)
http://linked.open...iv/cisloPeriodika
  • N/A
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 714137
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/00:02010115
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  • carbon nitride; - annealing; - pulsed laser deposition; inductively coupled plasma chemical vapour deposition (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [9956098CE20B]
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  • Thin Solid Films
http://linked.open...in/vavai/riv/obor
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http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 377-378
http://linked.open...iv/tvurceVysledku
  • Jelínek, Miroslav
  • Lančok, Ján
  • Bulíř, Jiří
  • Popov, C.
  • Kulisch, W.
  • Delplancke-Ogletree, M. P.
  • Zambov, L. M.
http://linked.open...n/vavai/riv/zamer
issn
  • 0040-6090
number of pages
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