About: Air flow and length noise in displacement interferometry

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We report on an evaluation of the influence that fast changes of the refractive index has on the uncertainty of interferometric displacement measurement. Measurement of position within a limited range is typical for coordinate measuring systems such as nanometrology standards combining scanning probe microscopy (SPM) with precise positioning. For long-range systems the varying refractive index of air contributes the most to the overall uncertainty. We proposed to extend the principle of compensation of the fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. In this contribution we evaluate the level of uncertainty associated with the nature of the fluctuations of the refractive index of air in laser interferometry. We have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path but play a significant role only over distances longer than 50 mm. Over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems. We report on an evaluation of the influence that fast changes of the refractive index has on the uncertainty of interferometric displacement measurement. Measurement of position within a limited range is typical for coordinate measuring systems such as nanometrology standards combining scanning probe microscopy (SPM) with precise positioning. For long-range systems the varying refractive index of air contributes the most to the overall uncertainty. We proposed to extend the principle of compensation of the fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. In this contribution we evaluate the level of uncertainty associated with the nature of the fluctuations of the refractive index of air in laser interferometry. We have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path but play a significant role only over distances longer than 50 mm. Over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems. (en)
Title	Air flow and length noise in displacement interferometry Air flow and length noise in displacement interferometry (en)
skos:prefLabel	Air flow and length noise in displacement interferometry Air flow and length noise in displacement interferometry (en)
skos:notation	RIV/68081731:_____/14:00441268!RIV15-TA0-68081731
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED0017/01/01), P(GB14-36681G), P(LO1212), P(TA01010995), P(TA02010711), P(TE01020233)
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Číp, Ondřej Šarbort, Martin Lazar, Josef Holá, Miroslava
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	1912
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/14:00441268
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	refractometry; refractive index of air; interferometer; measuring system (en)
http://linked.open.../riv/klicoveSlovo	measuring system refractive index of air refractometry interferometer
http://linked.open...ontrolniKodProRIV	[C322D703A2E3]
http://linked.open...v/mistoKonaniAkce	Liberec
http://linked.open...i/riv/mistoVydani	Bellingham
http://linked.open...i/riv/nazevZdroje	Optics and Measurement Conference 2014 (Proceedings of SPIE 9442)
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced Microscopy and Spectroscopy Platform for Research and Development in Nano and Microtechnologies - AMISPEC ALISI - Centre of advanced diagnostic methods and technologies APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES Stabilized laser sources fro spectrometer calibration of optical communications. Center of Excellence for Classical and Quantum Interactions in Nanoworld Advanced interferometric systems for measurement in nanotechnology
http://linked.open...UplatneniVysledku	2014
http://linked.open...iv/tvurceVysledku	Lazar, Josef Číp, Ondřej Šarbort, Martin Holá, Miroslava
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2014-10-07 (xsd:date)
issn	0277-786X
number of pages	7 (xsd:int)
http://bibframe.org/vocab/doi	10.1117/12.2176179
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	9781628415575

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