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  • We propose to extend the principle of compensation of the fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. The concept is derived form a tracking refractometry evaluating the refractive index of air in the beam axis coinciding with the positioning interferometer. Application of this approach in multi-axis positioning and measurement mans to compromise the principle of spatial unity of the displacement measuring laser beam and the beam of the tracking refractometer. In this contribution we evaluate the level of uncertainty associated with the spatial shift of these two beams. Consequently the nature of the fluctuations of the refractive index of air in laser interferometry is investigated and discussed with the focus on potential applications in coordinate measuring systems and long-range metrological scanning probe microscopy systems.
  • We propose to extend the principle of compensation of the fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. The concept is derived form a tracking refractometry evaluating the refractive index of air in the beam axis coinciding with the positioning interferometer. Application of this approach in multi-axis positioning and measurement mans to compromise the principle of spatial unity of the displacement measuring laser beam and the beam of the tracking refractometer. In this contribution we evaluate the level of uncertainty associated with the spatial shift of these two beams. Consequently the nature of the fluctuations of the refractive index of air in laser interferometry is investigated and discussed with the focus on potential applications in coordinate measuring systems and long-range metrological scanning probe microscopy systems. (en)
Title
  • In-beam tracking refractometry for coordinate interferometric measurement
  • In-beam tracking refractometry for coordinate interferometric measurement (en)
skos:prefLabel
  • In-beam tracking refractometry for coordinate interferometric measurement
  • In-beam tracking refractometry for coordinate interferometric measurement (en)
skos:notation
  • RIV/68081731:_____/14:00434169!RIV15-TA0-68081731
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, P(ED0017/01/01), P(EE2.4.31.0016), P(GPP102/11/P820), P(LO1212), P(TA01010995), P(TA02010711), P(TE01020233)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 21105
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/14:00434169
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • refractometry; refractive index; interferometers; laser interferometry; lasers; scanning probe microscopy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [69F4CE876E70]
http://linked.open...v/mistoKonaniAkce
  • Brussels
http://linked.open...i/riv/mistoVydani
  • Bellingham
http://linked.open...i/riv/nazevZdroje
  • Optical Micro- and Nanometrology V. (Proceedings of SPIE 9132)
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Buchta, Zdeněk
  • Lazar, Josef
  • Číp, Ondřej
  • Holá, Miroslava
http://linked.open...vavai/riv/typAkce
http://linked.open...ain/vavai/riv/wos
  • 000345034500051
http://linked.open.../riv/zahajeniAkce
issn
  • 0277-786X
number of pages
http://bibframe.org/vocab/doi
  • 10.1117/12.2052920
http://purl.org/ne...btex#hasPublisher
  • SPIE
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