About: Frequency Noise Properties of Lasers for Interferometry in Nanometrology

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of fluctuations in displacement in the Michelson interferometer. Several laser sources, including traditional He-Ne and solid-state lasers, and their noise properties are evaluated and compared. The contribution of the laser frequency noise to the displacement measurement is discussed in the context of other sources of uncertainty associated with the interferometric setup, such as, mechanics, resolution of analog-to-digital conversion, frequency bandwidth of the detection chain, and variations of the refractive index of air. In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of fluctuations in displacement in the Michelson interferometer. Several laser sources, including traditional He-Ne and solid-state lasers, and their noise properties are evaluated and compared. The contribution of the laser frequency noise to the displacement measurement is discussed in the context of other sources of uncertainty associated with the interferometric setup, such as, mechanics, resolution of analog-to-digital conversion, frequency bandwidth of the detection chain, and variations of the refractive index of air. (en)
Title	Frequency Noise Properties of Lasers for Interferometry in Nanometrology Frequency Noise Properties of Lasers for Interferometry in Nanometrology (en)
skos:prefLabel	Frequency Noise Properties of Lasers for Interferometry in Nanometrology Frequency Noise Properties of Lasers for Interferometry in Nanometrology (en)
skos:notation	RIV/68081731:_____/13:00389837!RIV14-GA0-68081731
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED0017/01/01), P(GA102/09/1276), P(GPP102/11/P820), P(KAN311610701), P(LC06007)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Hrabina, Jan Číp, Ondřej Lazar, Josef Holá, Miroslava
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	75756
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/13:00389837
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanometrology; laser noise; interferometry; nanopositioning; AFM (en)
http://linked.open.../riv/klicoveSlovo	AFM interferometry nanometrology nanopositioning laser noise
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[1E9D5F6BF671]
http://linked.open...i/riv/nazevZdroje	Sensors
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES Nanometrology using methods of scanning probe microscopy Centre of Modern Optics Interferometer with full in-line compensation of the fluctuations of refractive index Interferometric measurement techniques for nanopositioning
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	13
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Lazar, Josef Číp, Ondřej Holá, Miroslava
http://linked.open...ain/vavai/riv/wos	000315403300049
issn	1424-8220
number of pages	14 (xsd:int)
http://bibframe.org/vocab/doi	10.3390/s130202206

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