About: Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope

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About: Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Signal trajectories of secondary (SE) and backscattered electrons (BSE) were simulated for two cases: an immersion magnetic objective lens alone and for the case when an electrostatic immersion objective lens is added. Micrographs of a semiconductor structure are presented for these two set-ups. Signal trajectories of secondary (SE) and backscattered electrons (BSE) were simulated for two cases: an immersion magnetic objective lens alone and for the case when an electrostatic immersion objective lens is added. Micrographs of a semiconductor structure are presented for these two set-ups. (en)
Title	Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope (en)
skos:prefLabel	Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope (en)
skos:notation	RIV/68081731:_____/12:00379916!RIV12-AV0-68081731
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(FR-TI3/323)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Hovorka, Miloš Müllerová, Ilona Konvalina, Ivo Mika, Filip
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	123473
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/12:00379916
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	scanning electron microscopy; cathode lens; secondary electrons; backscattered electrons (en)
http://linked.open.../riv/klicoveSlovo	cathode lens backscattered electrons secondary electrons scanning electron microscopy
http://linked.open...ontrolniKodProRIV	[FCD81EE5A258]
http://linked.open...v/mistoKonaniAkce	Perth
http://linked.open...i/riv/mistoVydani	Wembley
http://linked.open...i/riv/nazevZdroje	Coneference Proceedings APMC-10, ICONN 2012 and ACMM-22
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	*New contrast mechanisms in scanning electron microscope
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Konvalina, Ivo Hovorka, Miloš Müllerová, Ilona Mika, Filip
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2012-02-05 (xsd:date)
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	EECW Pty Ltd
https://schema.org/isbn	978-1-74052-245-8

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