About: Scanning Probe Microscopy: Measuring on Hard Surfaces

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	During a measurement by scanning probe microscopy (SPM) an image artifacts can appear in a measurement data. The source of image artifacts during an SPM measurement could be in parts of the SPM tool: mechanical system, piezoelectric crystal, scanner electronic. However, the main source of image artifact is the probe tip geometry and properties of the sample. For example, probe wearing, which occurs during the contact measurement on a sample with a hard surface, could result in heavy probe shape change, causing probe-related image artifacts. Measurement could appear problematic on a sample with periodical relief structure (e.g. gratings with sub 10 μm periodicity) prepared in hard materials (e.g. silicon), when the structure height is greater than about 500 nm. In this case, probe can easily get struck during the scanning, on the hard surface as well as at the high aspect ratio relief structure, causing image artifact thus reducing measurement quality. During a measurement by scanning probe microscopy (SPM) an image artifacts can appear in a measurement data. The source of image artifacts during an SPM measurement could be in parts of the SPM tool: mechanical system, piezoelectric crystal, scanner electronic. However, the main source of image artifact is the probe tip geometry and properties of the sample. For example, probe wearing, which occurs during the contact measurement on a sample with a hard surface, could result in heavy probe shape change, causing probe-related image artifacts. Measurement could appear problematic on a sample with periodical relief structure (e.g. gratings with sub 10 μm periodicity) prepared in hard materials (e.g. silicon), when the structure height is greater than about 500 nm. In this case, probe can easily get struck during the scanning, on the hard surface as well as at the high aspect ratio relief structure, causing image artifact thus reducing measurement quality. (en)
Title	Scanning Probe Microscopy: Measuring on Hard Surfaces Scanning Probe Microscopy: Measuring on Hard Surfaces (en)
skos:prefLabel	Scanning Probe Microscopy: Measuring on Hard Surfaces Scanning Probe Microscopy: Measuring on Hard Surfaces (en)
skos:notation	RIV/68081731:_____/11:00375381!RIV12-MSM-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(ED0017/01/01), P(FR-TI1/576), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Kolařík, Vladimír Matějka, Milan Urbánek, Michal
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	228215
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/11:00375381
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	scanning probe microscopy; atomic force microscopy; hard surface samples measuring; image artifacts; polymer coatings (en)
http://linked.open.../riv/klicoveSlovo	scanning probe microscopy hard surface samples measuring image artifacts polymer coatings atomic force microscopy
http://linked.open...ontrolniKodProRIV	[E254749888FA]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Ostrava
http://linked.open...i/riv/nazevZdroje	NANOCON 2011. 3rd International Conference
http://linked.open...in/vavai/riv/obor	JP
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Optimization of electron-beam production technology APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Matějka, Milan Urbánek, Michal Kolařík, Vladimír
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2011-09-21 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Tanger spol. s r. o
https://schema.org/isbn	978-80-87294-27-7

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