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  • The basic philosophy of the ionisation detector of secondary electrons with electrostatic separator (ISEDS), is to optimize the physical principle of the detection of signal electrons in high pressure conditions of VP SEM in order to achieve a higher purity of the secondary electrons signal with a minimal contribution of backscattered electrons. Suitably situated electrostatic fields of separator of ISEDS, placed mainly above and around observed sample, efficiently filter away the high energy BSEs and enable to detect low energy SEs with high selectivity.
  • The basic philosophy of the ionisation detector of secondary electrons with electrostatic separator (ISEDS), is to optimize the physical principle of the detection of signal electrons in high pressure conditions of VP SEM in order to achieve a higher purity of the secondary electrons signal with a minimal contribution of backscattered electrons. Suitably situated electrostatic fields of separator of ISEDS, placed mainly above and around observed sample, efficiently filter away the high energy BSEs and enable to detect low energy SEs with high selectivity. (en)
Title
  • Ionisation Detector for Environmental Scanning Microscope
  • Ionisation Detector for Environmental Scanning Microscope (en)
skos:prefLabel
  • Ionisation Detector for Environmental Scanning Microscope
  • Ionisation Detector for Environmental Scanning Microscope (en)
skos:notation
  • RIV/68081731:_____/11:00372211!RIV12-AV0-68081731
http://linked.open...avai/riv/aktivita
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  • Z(AV0Z20650511)
http://linked.open...cisloPatentuVzoru
  • EP2195822
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  • 205793
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  • RIV/68081731:_____/11:00372211
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  • ionisation detector; secondary electrons; electrostatic separator (en)
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  • [49A159672F6F]
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  • Munich, The Hague, Berlin, Vienna, Brussels
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  • Evropský patentový úřad
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  • Jirák, Josef
  • Neděla, Vilém
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  • Ústav přístrojové techniky AV ČR, v. v. i
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