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rdf:type
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Description
| - This work deals with the measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. We present a new design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The measurement tool is powered by solid-state frequency-doubled Nd:YAG laser stabilized by linear absorption spectroscopy with the help of a new type of iodine absorption cell based on borosilicate glass material.
- This work deals with the measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. We present a new design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The measurement tool is powered by solid-state frequency-doubled Nd:YAG laser stabilized by linear absorption spectroscopy with the help of a new type of iodine absorption cell based on borosilicate glass material. (en)
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Title
| - Nanometrology Interferometric System for Local Probe Microscopy
- Nanometrology Interferometric System for Local Probe Microscopy (en)
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skos:prefLabel
| - Nanometrology Interferometric System for Local Probe Microscopy
- Nanometrology Interferometric System for Local Probe Microscopy (en)
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skos:notation
| - RIV/68081731:_____/11:00368141!RIV12-MSM-68081731
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GA102/09/1276), P(GPP102/11/P820), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68081731:_____/11:00368141
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - atomic force microscopy (AFM); nanometrology; nanopositioning interferometry; nanoscale; iodine cells; spectroscopy (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - Proceedings of the 20th IMEKO TC2 Symposium on Photonics in Measurement
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Hrabina, Jan
- Klapetek, P.
- Lazar, Josef
- Číp, Ondřej
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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https://schema.org/isbn
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