About: AFM nanometrology interferometric system with the compensation of angle errors

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary standard. This leads to the engagement of laser interferometric measuring methods. We present a improved design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The setup is powered with the help of a single-frequency frequency-doubled Nd:YAG laser which is stabilized by thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique is described together with comparison of frequency stability and angle errors compensation system performance. The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary standard. This leads to the engagement of laser interferometric measuring methods. We present a improved design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The setup is powered with the help of a single-frequency frequency-doubled Nd:YAG laser which is stabilized by thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique is described together with comparison of frequency stability and angle errors compensation system performance. (en)
Title	AFM nanometrology interferometric system with the compensation of angle errors AFM nanometrology interferometric system with the compensation of angle errors (en)
skos:prefLabel	AFM nanometrology interferometric system with the compensation of angle errors AFM nanometrology interferometric system with the compensation of angle errors (en)
skos:notation	RIV/68081731:_____/11:00367516!RIV12-MSM-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/127), P(2A-3TP1/113), P(2C06012), P(FT-TA3/133), P(GA102/07/1179), P(GA102/09/1276), P(LC06007), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Hrabina, Jan Číp, Ondřej Lazar, Josef
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	184821
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/11:00367516
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	atomic force microscopy (AFM); nanometrology; nanoscale; nanopositioning; interferometry; abbe errors (en)
http://linked.open.../riv/klicoveSlovo	abbe errors atomic force microscopy (AFM) interferometry nanometrology nanopositioning nanoscale
http://linked.open...ontrolniKodProRIV	[82D19E21C680]
http://linked.open...v/mistoKonaniAkce	Munich
http://linked.open...i/riv/mistoVydani	Bellingham
http://linked.open...i/riv/nazevZdroje	Optical Measurement Systems for Industrial Inspection VII (Proceedings of SPIE Vol. 8082)
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Centre of Modern Optics The research of methods of diagnostics of gauge blocks for precicion engineering *Investigetion of dynamics of the laser welding process and its control Safe optical wireless links for municipal networks System of laser interferometers for nanometrology of lenghts. Methods for determination of the refractive index of air with optical resonators Interferometer with full in-line compensation of the fluctuations of refractive index
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Klapetek, P. Lazar, Josef Číp, Ondřej
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open...ain/vavai/riv/wos	000295076900133
http://linked.open.../riv/zahajeniAkce	2011-05-23 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1117/12.889544
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	978-0-8194-8678-3

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