About: Multidimensional interferometric tool for the local probe microscopy nanometrology

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	This work reports on the measurement at the nanoscale using local probe microscopy techniques, primarily atomic force microscopy. Recent applications using the atomic force microscope as a nanometrology tool require that not only the positioning of the tip has to be based on precise measurements but also the traceability of the measuring technique has to be ensured up to the primary standard. Thus, in our experimental work, laser interferometric measuring methods were employed. In this paper, a new design of the six-axis-dimensional interferometric measurement tool for local probe microscopy stage nanopositioning is presented. This work reports on the measurement at the nanoscale using local probe microscopy techniques, primarily atomic force microscopy. Recent applications using the atomic force microscope as a nanometrology tool require that not only the positioning of the tip has to be based on precise measurements but also the traceability of the measuring technique has to be ensured up to the primary standard. Thus, in our experimental work, laser interferometric measuring methods were employed. In this paper, a new design of the six-axis-dimensional interferometric measurement tool for local probe microscopy stage nanopositioning is presented. (en)
Title	Multidimensional interferometric tool for the local probe microscopy nanometrology Multidimensional interferometric tool for the local probe microscopy nanometrology (en)
skos:prefLabel	Multidimensional interferometric tool for the local probe microscopy nanometrology Multidimensional interferometric tool for the local probe microscopy nanometrology (en)
skos:notation	RIV/68081731:_____/11:00366031!RIV12-MSM-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA102/09/1276), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika	9
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Hrabina, Jan Číp, Ondřej Lazar, Josef
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	214205
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/11:00366031
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	atomic force microscopy (AFM); nanometrology; nanopositioning interferometry; nanoscale (en)
http://linked.open.../riv/klicoveSlovo	nanopositioning interferometry atomic force microscopy (AFM) nanometrology nanoscale
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[1B26494C47CB]
http://linked.open...i/riv/nazevZdroje	Measurement Science and Technology
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanometrology using methods of scanning probe microscopy Centre of Modern Optics Interferometer with full in-line compensation of the fluctuations of refractive index
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	22
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Klapetek, P. Lazar, Josef Číp, Ondřej
http://linked.open...ain/vavai/riv/wos	000294764800031
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
issn	0957-0233
number of pages	8 (xsd:int)
http://bibframe.org/vocab/doi	10.1088/0957-0233/22/9/094030

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