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  • Among traditional methods of the electron microscopy (EM) the transmission EM operates at highest energies of electrons and the sample used to be immersed in strong magnetic field. The emission EM has its sample emitting very slow electrons in strong electric field of the cathode lens (CL). The conventional scanning EM (SEM) worked in the medium energy range with the sample in a field free space. Immersion of the SEM sample into magnetic field (and correction of aberrations) improved the resolution up to observation of single atoms. When transferring the CL principle into the SEM we preserve a small primary spot down to lowest energies with the electric field strength as a factor limiting the resolution.
  • Among traditional methods of the electron microscopy (EM) the transmission EM operates at highest energies of electrons and the sample used to be immersed in strong magnetic field. The emission EM has its sample emitting very slow electrons in strong electric field of the cathode lens (CL). The conventional scanning EM (SEM) worked in the medium energy range with the sample in a field free space. Immersion of the SEM sample into magnetic field (and correction of aberrations) improved the resolution up to observation of single atoms. When transferring the CL principle into the SEM we preserve a small primary spot down to lowest energies with the electric field strength as a factor limiting the resolution. (en)
Title
  • Advances in Low Energy Scanning Electron Microscopy
  • Advances in Low Energy Scanning Electron Microscopy (en)
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  • Advances in Low Energy Scanning Electron Microscopy
  • Advances in Low Energy Scanning Electron Microscopy (en)
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  • RIV/68081731:_____/10:00352422!RIV11-AV0-68081731
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  • P(IAA100650902), Z(AV0Z20650511)
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  • 245534
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  • RIV/68081731:_____/10:00352422
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  • electron microscopy; cathode lens; slow backscattered electrons; STEM; VLESTEM (en)
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  • [F6D127684AC4]
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  • Rio de Janeiro
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  • Rio de Janeiro
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  • Proceedings of the 17th IFSM International Microscopy Congress
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  • Hovorka, Miloš
  • Müllerová, Ilona
  • Frank, Luděk
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number of pages
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  • Sociedade Brasileira de Microscopia e Microanilise
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  • 978-85-63273-06-2
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