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  • An important role of the scanning electron microscopy (SEM) is to image and examine the local crystallinic structure of materials. As an alternative to the traditional EBSD method, suffering from slow data collection and limited lateral resolution, employment of very slow backscattered electrons (BSE) and of BSE leaving the sample at high angles with respect to the surface normal appears very promising. Neither of these signals is available in conventional SEM devices as the former species have insufficient energy to be detected while the later usually miss the detector.
  • An important role of the scanning electron microscopy (SEM) is to image and examine the local crystallinic structure of materials. As an alternative to the traditional EBSD method, suffering from slow data collection and limited lateral resolution, employment of very slow backscattered electrons (BSE) and of BSE leaving the sample at high angles with respect to the surface normal appears very promising. Neither of these signals is available in conventional SEM devices as the former species have insufficient energy to be detected while the later usually miss the detector. (en)
Title
  • Low Energy Reflection and High Angle Reflection of Electrons in the SEM
  • Low Energy Reflection and High Angle Reflection of Electrons in the SEM (en)
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  • Low Energy Reflection and High Angle Reflection of Electrons in the SEM
  • Low Energy Reflection and High Angle Reflection of Electrons in the SEM (en)
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  • RIV/68081731:_____/10:00352416!RIV11-MSM-68081731
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  • P(OE08012), Z(AV0Z20650511)
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  • 268953
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  • RIV/68081731:_____/10:00352416
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  • scanning electron microscopy; crystallinic structure; slow backscattered electrons (en)
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  • [DF8FCE3300A0]
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  • Rio de Janeiro
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  • Rio de Janeiro
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  • Proceedings of the 17th IFSM International Microscopy Congress
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  • Mikmeková, Šárka
  • Hovorka, Miloš
  • Müllerová, Ilona
  • Frank, Luděk
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number of pages
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  • Sociedade Brasileira de Microscopia e Microanilise
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  • 978-85-63273-06-2
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