About: Interferometric nanocomparator for calibrating precision displacement sensors

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Presented work deals with the description of a novel interferometric nanocomparator intended for calibrating displacement sensors with nanometer resolution used in precision engineering. The nanocomparator is based on a 633 nm laser homodyne interferometer with 2-pass measuring arm. Digital signal filtering increases the SNR and allows achieving sub-nanometer resolution of interferometric measurements. High dynamic range of the measuring mirror displacement is achieved using a two-stage positioning system formed of a linear guide way and piezoelectric actuators. A linear guide way is used for positioning over a 100 mm range with 50 nm resolution. Piezoelectric actuators linked in a closed loop locked to the interferometer value are used for fine positioning with better than 1 nm resolution over a 5 um range. Presented work deals with the description of a novel interferometric nanocomparator intended for calibrating displacement sensors with nanometer resolution used in precision engineering. The nanocomparator is based on a 633 nm laser homodyne interferometer with 2-pass measuring arm. Digital signal filtering increases the SNR and allows achieving sub-nanometer resolution of interferometric measurements. High dynamic range of the measuring mirror displacement is achieved using a two-stage positioning system formed of a linear guide way and piezoelectric actuators. A linear guide way is used for positioning over a 100 mm range with 50 nm resolution. Piezoelectric actuators linked in a closed loop locked to the interferometer value are used for fine positioning with better than 1 nm resolution over a 5 um range. (en)
Title	Interferometric nanocomparator for calibrating precision displacement sensors Interferometric nanocomparator for calibrating precision displacement sensors (en)
skos:prefLabel	Interferometric nanocomparator for calibrating precision displacement sensors Interferometric nanocomparator for calibrating precision displacement sensors (en)
skos:notation	RIV/68081731:_____/10:00352218!RIV11-AV0-68081731
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Buchta, Zdeněk Čížek, Martin Číp, Ondřej Lazar, Josef Mikel, Břetislav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	264488
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/10:00352218
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	interferometry; nanometrology; calibration (en)
http://linked.open.../riv/klicoveSlovo	calibration interferometry nanometrology
http://linked.open...ontrolniKodProRIV	[6848BFC52410]
http://linked.open...v/mistoKonaniAkce	San Diego
http://linked.open...i/riv/mistoVydani	Bellingham
http://linked.open...i/riv/nazevZdroje	Interferometry XV: Applications (Proceedings of SPIE Vol. 7791)
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Buchta, Zdeněk Lazar, Josef Číp, Ondřej Čížek, Martin Mikel, Břetislav
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-08-02 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	7 (xsd:int)
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	978-0-8194-8287-7

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