About: Multiaxis interferometric system for positioning in nanometrology

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine and the interferometric configuration controls the stage position in all six degrees of freedom. We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine and the interferometric configuration controls the stage position in all six degrees of freedom. (en)
Title	Multiaxis interferometric system for positioning in nanometrology Multiaxis interferometric system for positioning in nanometrology (en)
skos:prefLabel	Multiaxis interferometric system for positioning in nanometrology Multiaxis interferometric system for positioning in nanometrology (en)
skos:notation	RIV/68081731:_____/10:00352186!RIV11-AV0-68081731
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Čížek, Martin Hrabina, Jan Číp, Ondřej Lazar, Josef Šerý, Mojmír
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	273053
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/10:00352186
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanometrology; interferometry; traceability; local probe microscopy; nanopositioning (en)
http://linked.open.../riv/klicoveSlovo	local probe microscopy traceability interferometry nanometrology nanopositioning
http://linked.open...ontrolniKodProRIV	[23831A2DBBFE]
http://linked.open...v/mistoKonaniAkce	Catania
http://linked.open...i/riv/mistoVydani	Sofia
http://linked.open...i/riv/nazevZdroje	Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Klapetek, P. Lazar, Josef Číp, Ondřej Čížek, Martin Šerý, Mojmír
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-05-29 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	WSEAS EUROPMENT Press
https://schema.org/isbn	978-954-92600-3-8

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