About: Semiconductor laser sources at 760 nm wavelength for nanometrology

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Measurement with nanometer resolution is required for the next advance in nanotechnology. Especially the noncontacting methods of measurement are very .promising. We present the set-up of the laser interferometer with nanometer resolution. A stabilized laser source with the DFB (Distributed FeedBack) laser diode was developed and its realization was implemented to the laser interferometer. The output of the DFB laser source and the design of optical set-up of the laser interferometer are realized by fiber optics. It will improve repeatability of measuring by reducing the influence of the index of refraction of air. The measurement probe is realized by standard optical fiber with reflection coated optical connector. Due to using of the DFB laser source it is possible to measure of the length in incremental or absolute regime. The stability and the tunability of the wavelength of the laser source are crucial parameters to improve resolution and accuracy of the laser interferometer. Measurement with nanometer resolution is required for the next advance in nanotechnology. Especially the noncontacting methods of measurement are very .promising. We present the set-up of the laser interferometer with nanometer resolution. A stabilized laser source with the DFB (Distributed FeedBack) laser diode was developed and its realization was implemented to the laser interferometer. The output of the DFB laser source and the design of optical set-up of the laser interferometer are realized by fiber optics. It will improve repeatability of measuring by reducing the influence of the index of refraction of air. The measurement probe is realized by standard optical fiber with reflection coated optical connector. Due to using of the DFB laser source it is possible to measure of the length in incremental or absolute regime. The stability and the tunability of the wavelength of the laser source are crucial parameters to improve resolution and accuracy of the laser interferometer. (en)
Title	Semiconductor laser sources at 760 nm wavelength for nanometrology Semiconductor laser sources at 760 nm wavelength for nanometrology (en)
skos:prefLabel	Semiconductor laser sources at 760 nm wavelength for nanometrology Semiconductor laser sources at 760 nm wavelength for nanometrology (en)
skos:notation	RIV/68081731:_____/10:00352185!RIV11-GA0-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/127), P(ED0017/01/01), P(GP102/09/P293), P(GP102/09/P630), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Buchta, Zdeněk Číp, Ondřej Lazar, Josef Mikel, Břetislav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	286881
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/10:00352185
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	laser interferometry; absolute measurement; tunable laser diodes (en)
http://linked.open.../riv/klicoveSlovo	absolute measurement laser interferometry tunable laser diodes
http://linked.open...ontrolniKodProRIV	[CC73BD1AC39C]
http://linked.open...v/mistoKonaniAkce	Catania
http://linked.open...i/riv/mistoVydani	Sofia
http://linked.open...i/riv/nazevZdroje	Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Optimized system of dimensional low coherence interferometry High resolution multiwavelegth absolute laser interferometry APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES The research of methods of diagnostics of gauge blocks for precicion engineering
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Buchta, Zdeněk Lazar, Josef Číp, Ondřej Mikel, Břetislav
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-05-29 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	WSEAS EUROPMENT Press
https://schema.org/isbn	978-954-92600-3-8

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