About: Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model

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About: Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional–radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional–radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional article-in-cell/Monte Carlo (PIC/MC) simulation. A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional–radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional–radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional article-in-cell/Monte Carlo (PIC/MC) simulation. (en)
Title	Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model (en)
skos:prefLabel	Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model (en)
skos:notation	RIV/68081731:_____/10:00350874!RIV11-GA0-68081731
http://linked.open...avai/riv/aktivita	P S Z
http://linked.open...avai/riv/aktivity	P(GA202/07/1669), P(GA202/09/0800), P(KAN101630651), S, Z(AV0Z20650511), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika	Nov 3
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Brzobohatý, Oto
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	253741
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/10:00350874
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	electron temperature; electron density; optical emission spectroscopy; collisional–radiative model (en)
http://linked.open.../riv/klicoveSlovo	electron density optical emission spectroscopy electron temperature collisional–radiative model
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[CE575229EB7B]
http://linked.open...i/riv/nazevZdroje	Journal of Physics D-Applied Physics
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges Preparation of nano-films and nano-coatings on textiles using plasma surface treatment at atmospheric pressure Pulse mode and microwave plasma sources - research and applications
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	43
http://linked.open...iv/tvurceVysledku	Brzobohatý, Oto Dvořák, P. Navrátil, Z. Trunec, D.
http://linked.open...ain/vavai/riv/wos	000284942800007
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	0022-3727
number of pages	11 (xsd:int)

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