About: Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope

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About: Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Structure of thin films usually requires to be examined on microscopic level. The research topics like growth and stability of thin films, phase transitions and separation, crystallization, diffusion and defect formation has a need for LEED or XPS as techniques adequate for investigation of atomic transport processes on short length scales. The low energy electron microscopy is a complementary solution for imaging of samples with special concern for knowledge of surface physics and material science. In this contribution the microscopic examination of as-deposited and thermal treated thin films on Si substrates is performed. Structure of thin films usually requires to be examined on microscopic level. The research topics like growth and stability of thin films, phase transitions and separation, crystallization, diffusion and defect formation has a need for LEED or XPS as techniques adequate for investigation of atomic transport processes on short length scales. The low energy electron microscopy is a complementary solution for imaging of samples with special concern for knowledge of surface physics and material science. In this contribution the microscopic examination of as-deposited and thermal treated thin films on Si substrates is performed. (en)
Title	Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope (en)
skos:prefLabel	Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope (en)
skos:notation	RIV/68081731:_____/10:00350672!RIV11-AV0-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA100650803), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Mikmeková, Šárka Frank, Luděk Zobačová, Jitka
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	262886
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/10:00350672
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	thin films; SLEEM; Si substrate (en)
http://linked.open.../riv/klicoveSlovo	Si substrate thin films SLEEM
http://linked.open...ontrolniKodProRIV	[93728E13E12C]
http://linked.open...v/mistoKonaniAkce	Skalský dvůr
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Coherent imaging of nanostructures in a low-energy scanning electron microscope with an area detector of electrons
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Mikmeková, Šárka Frank, Luděk Polčák, J. Zobačová, Jitka
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-05-31 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Institute of Scientific Instruments AS CR, v.v.i
https://schema.org/isbn	978-80-254-6842-5

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