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  • The ion beams used in SIMS are produced by liquid–metal ion sources (LMIS) which provide fine, optically bright ion beams even for low emission currents around 1 .mu.A or less. The typical energy of the primary beam varies from 10 to 40 keV. The properties of the LMIS are strongly limited by the effect of the Discrete Coulomb Interactions (DCI) near the source. The DCI increase the energy width (Boersh effect) and decrease the brightness of the source due to the trajectory displacement effect. Contrary to the Ga LMIS which contains mostly only Ga+ ions, in case of the Bi LMIS the ion beam consists of several ion types and clusters of ions with similar currents. Because each ion type has different charge and mass they will be accelerated to different velocities, which increase the number of interactions and decreases the quality of the source. The aim of this contribution is a simulation of the effect of the clusters on the source properties based on the MC simulation.
  • The ion beams used in SIMS are produced by liquid–metal ion sources (LMIS) which provide fine, optically bright ion beams even for low emission currents around 1 .mu.A or less. The typical energy of the primary beam varies from 10 to 40 keV. The properties of the LMIS are strongly limited by the effect of the Discrete Coulomb Interactions (DCI) near the source. The DCI increase the energy width (Boersh effect) and decrease the brightness of the source due to the trajectory displacement effect. Contrary to the Ga LMIS which contains mostly only Ga+ ions, in case of the Bi LMIS the ion beam consists of several ion types and clusters of ions with similar currents. Because each ion type has different charge and mass they will be accelerated to different velocities, which increase the number of interactions and decreases the quality of the source. The aim of this contribution is a simulation of the effect of the clusters on the source properties based on the MC simulation. (en)
Title
  • Properties of Bi LIMS with ion clusters
  • Properties of Bi LIMS with ion clusters (en)
skos:prefLabel
  • Properties of Bi LIMS with ion clusters
  • Properties of Bi LIMS with ion clusters (en)
skos:notation
  • RIV/68081731:_____/10:00350670!RIV11-AV0-68081731
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • R, Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...dnocenehoVysledku
  • 282910
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  • RIV/68081731:_____/10:00350670
http://linked.open...riv/jazykVysledku
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  • SIMS; liquid–metal ion sources (LMIS); discrete coulomb interactions (DCI) (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [AD57527985CD]
http://linked.open...v/mistoKonaniAkce
  • Skalský dvůr
http://linked.open...i/riv/mistoVydani
  • Brno
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  • Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Radlička, Tomáš
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • Institute of Scientific Instruments AS CR, v.v.i
https://schema.org/isbn
  • 978-80-254-6842-5
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