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Description
  • The article deals with a prezentation of results of optimization of secondary electron detection by an ionization detector in the environmental scanning electron microscope. The ionization detectors consisting of a varied electrode geometry and varied voltages on these electrodes, named segmental ionization detectors, are presented as a possibility to reach desired contrasts in a specimen image. In this work, images acquired by several detectors demonstrate detection of different types of signal electrons utilizing a specimen containing thin surface layers and a specimen made for a material contrast measurement.
  • The article deals with a prezentation of results of optimization of secondary electron detection by an ionization detector in the environmental scanning electron microscope. The ionization detectors consisting of a varied electrode geometry and varied voltages on these electrodes, named segmental ionization detectors, are presented as a possibility to reach desired contrasts in a specimen image. In this work, images acquired by several detectors demonstrate detection of different types of signal electrons utilizing a specimen containing thin surface layers and a specimen made for a material contrast measurement. (en)
  • Článek se zabývá prezentací výsledků optimalizace detekce sekundárních elektronů ionizačním detektorem v environmentálním rastrovacím elektronovém mikroskopu. Ionizační detektory mající různé geometrie elektrod a různá napětí na těchto elektrodách, tzv. segmentové ionizační detektory, jsou prezentovány jako možnost k dosažení požadovaných kontrastů v obraze vzorku. Snímky v této práci získané několika detektory demonstrují detekci různých typů elektronů s využitím vzorku obsahující tenké povrchové vrstvy a vzorku vyrobeného k měření materiálového kontrastu. (cs)
Title
  • Optimization of Secondary Electron Detection by Segmental lonization Detector in Environmental SEM
  • Optimalizace detekce sekundárních elektronů segmentovým ionizačním detektorem v environmentálním REM (cs)
  • Optimization of Secondary Electron Detection by Segmental lonization Detector in Environmental SEM (en)
skos:prefLabel
  • Optimization of Secondary Electron Detection by Segmental lonization Detector in Environmental SEM
  • Optimalizace detekce sekundárních elektronů segmentovým ionizačním detektorem v environmentálním REM (cs)
  • Optimization of Secondary Electron Detection by Segmental lonization Detector in Environmental SEM (en)
skos:notation
  • RIV/68081731:_____/07:00092588!RIV08-GA0-68081731
http://linked.open.../vavai/riv/strany
  • 79;80
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA102/05/0886), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 439894
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/07:00092588
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • secondary electron detection; segmental ionization detector; environmental SEM (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [07FD5612C3D0]
http://linked.open...v/mistoKonaniAkce
  • Prague
http://linked.open...i/riv/mistoVydani
  • Prague
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 8th Multinational Congress on Microscopy
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Jirák, Josef
  • Černoch, P.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Czechoslovak Microscopy Society
https://schema.org/isbn
  • 978-80-239-9397-4
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