About: Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM     Goto   Sponge   NotDistinct   Permalink

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Description
  • Článek se zabývá problémy zobrazování nevodivých vzorků v SEM, které jsou způsobovány především jejich nabíjením. Použití nízké energie primárního svazku a pozorování pomocí zpětně odražených elektronů bylo navrženo pro potlačení nábojových artefaktů v obraze. Dále je popsán nově vyvinutý detektor zpětně odražených elektronů pro nízkoenrgiovou SEM a jsou prezentovány obrázky nepokovených nevodivých vzorků bez nábojových artefaktů pořízené tímto detektorem. (cs)
  • Article deals with the problems of imaging of non-conductive samples in the SEM that are caused mainly by charging. Use of the low primary beam energy and the observation by means of backscattered electrons are proposed as methods of suppression of charging artifacts in the image. Newly developed detector of backscattered electrons for the low energy SEM is described and images of uncoated non-conductive samples without charging artifacts taken by this detector are presented.
  • Article deals with the problems of imaging of non-conductive samples in the SEM that are caused mainly by charging. Use of the low primary beam energy and the observation by means of backscattered electrons are proposed as methods of suppression of charging artifacts in the image. Newly developed detector of backscattered electrons for the low energy SEM is described and images of uncoated non-conductive samples without charging artifacts taken by this detector are presented. (en)
Title
  • Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM
  • Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM (en)
  • Zobrazování nevodivých vzorků pomocí nízkoenergiových zpětně odražených elektronů v SEM (cs)
skos:prefLabel
  • Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM
  • Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM (en)
  • Zobrazování nevodivých vzorků pomocí nízkoenergiových zpětně odražených elektronů v SEM (cs)
skos:notation
  • RIV/68081731:_____/07:00092374!RIV08-AV0-68081731
http://linked.open.../vavai/riv/strany
  • 111;112
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(KJB200650501), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 425497
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/07:00092374
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • non-conductive samples; low energy SEM; backscattered electrons; charging (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [077600781E43]
http://linked.open...v/mistoKonaniAkce
  • Prague
http://linked.open...i/riv/mistoVydani
  • Prague
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 8th Multinational Congress on Microscopy
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Wandrol, Petr
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Czechoslovak Microscopy Society
https://schema.org/isbn
  • 978-80-239-9397-4
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