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  • Studies concerning assessment of the image quality in scanning electron microscopes and studies evaluating the detective efficiency of the secondary electron detectors in these microscopes must be based on statistics of secondary electron emission. The vast majority of previous studies have applied Poisson statistics, although their prerequisites have not been satisfied in most cases. This paper is concerned with the limits to the applicability of Poisson statistics to secondary electron emission. Adequate definition of a non-Poisson factor in the variance of the number of secondary electrons emitted is discussed, and a simple formula for this factor is derived for the low yield case in which both the primary and backscattered electron are assumed not to release more than one secondary electron. These conditions are met with conductive specimens composed of light elements at primary electron energies of tens of keV.
  • Studies concerning assessment of the image quality in scanning electron microscopes and studies evaluating the detective efficiency of the secondary electron detectors in these microscopes must be based on statistics of secondary electron emission. The vast majority of previous studies have applied Poisson statistics, although their prerequisites have not been satisfied in most cases. This paper is concerned with the limits to the applicability of Poisson statistics to secondary electron emission. Adequate definition of a non-Poisson factor in the variance of the number of secondary electrons emitted is discussed, and a simple formula for this factor is derived for the low yield case in which both the primary and backscattered electron are assumed not to release more than one secondary electron. These conditions are met with conductive specimens composed of light elements at primary electron energies of tens of keV. (en)
  • Studie zabývající se posuzováním kvality obrazu v rastrovacích elektronových mikroskopech a rovněž studie vyhodnocující detekční účinnost detektorů sekundárních elektronů v těchto mikroskopech je nutné založit na znalosti statistiky emise sekundárních elektronů. Drtivá většina dosavadních studií použila Poissonovu statistiku, ačkoliv její předpoklady nebyly vesměs splněny. Tento článek se zabývá mezemi použitelnosti Poissonovy statistiky na emisi sekundárních elektronů. Je diskutována vhodná definice faktoru odchylky od Poissonova rozdělení v případě variance počtu emitovaných sekundárních elektronů a je odvozen jednoduchý vzorec pro výpočet tohoto faktoru pro případ nízkého výtěžku, kdy ani primární ani zpětně odražený elektron neuvolní více než jeden elektron sekundární. Tyto podmínky jsou splněny u vodivých materiálů složených z lehkých prvků, a to při energii primárních elektronů v desítkách keV. (cs)
Title
  • Noise in secondary electron emission: the low yield case
  • Šum sekundární emise elektronů při nízkém emisním výtěžku (cs)
  • Noise in secondary electron emission: the low yield case (en)
skos:prefLabel
  • Noise in secondary electron emission: the low yield case
  • Šum sekundární emise elektronů při nízkém emisním výtěžku (cs)
  • Noise in secondary electron emission: the low yield case (en)
skos:notation
  • RIV/68081731:_____/05:00028799!RIV06-AV0-68081731
http://linked.open.../vavai/riv/strany
  • 361;365
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA1065304)
http://linked.open...iv/cisloPeriodika
  • 4
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 532943
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/05:00028799
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • secondary electrons; noise; SEM image noise; secondary emission noise; statistics of secondary electrons; non-Poisson factor (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • JP - Japonsko
http://linked.open...ontrolniKodProRIV
  • [9E929249410F]
http://linked.open...i/riv/nazevZdroje
  • Journal of Electron Microscopy
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 54
http://linked.open...iv/tvurceVysledku
  • Frank, Luděk
issn
  • 0022-0744
number of pages
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