About: Current trends in scanning low energy electron microscopy (SLEEM).

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The resolution of 1 nm at primary beam energy 15 keV and 1.5 nm at 1kV is being guaranteed for an up-to-date commercially available scanning electro n microscope with a cold field emission (CFE) gun. Quite recently, SEM imaging down to 100 eV was demonstrated with resolution on the test specimen (Au/C) that can be estimated to 10 nm [1]. It is well known that the cathode lens (CL) objective lens has to be used in order to improve the resolution to several nm for energies in tens or even units of eV [2 to 5]. At low and very low energies the problem of resolution has to be addressed specifically. The standard quadratic formula (SQF) has proved to provide a maximum estimate to the probe size [6]. This summation rule results from convolution of Gaussian confusion discs in which the ray radii are considered as mutually independent random variables with normal distributions. More realistic but still reasonable simple relation is obtained when defining the disc sizes via diameter encircling some current f The resolution of 1 nm at primary beam energy 15 keV and 1.5 nm at 1kV is being guaranteed for an up-to-date commercially available scanning electro n microscope with a cold field emission (CFE) gun. Quite recently, SEM imaging down to 100 eV was demonstrated with resolution on the test specimen (Au/C) that can be estimated to 10 nm [1]. It is well known that the cathode lens (CL) objective lens has to be used in order to improve the resolution to several nm for energies in tens or even units of eV [2 to 5]. At low and very low energies the problem of resolution has to be addressed specifically. The standard quadratic formula (SQF) has proved to provide a maximum estimate to the probe size [6]. This summation rule results from convolution of Gaussian confusion discs in which the ray radii are considered as mutually independent random variables with normal distributions. More realistic but still reasonable simple relation is obtained when defining the disc sizes via diameter encircling some current f (en)
Title	Current trends in scanning low energy electron microscopy (SLEEM). Current trends in scanning low energy electron microscopy (SLEEM). (en)
skos:prefLabel	Current trends in scanning low energy electron microscopy (SLEEM). Current trends in scanning low energy electron microscopy (SLEEM). (en)
skos:notation	RIV/68081731:_____/03:12030034!RIV/2004/AV0/A12004/N
http://linked.open.../vavai/riv/strany	85 ; 86
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA1065304), Z(AV0Z2065902)
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Frank, Luděk
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	602508
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/03:12030034
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	scanning electron microscopy; primary beam energy; field emission gun (en)
http://linked.open.../riv/klicoveSlovo	field emission gun primary beam energy scanning electron microscopy
http://linked.open...ontrolniKodProRIV	[047A965E634D]
http://linked.open...v/mistoKonaniAkce	Pula [HR]
http://linked.open...i/riv/mistoVydani	Zagreb
http://linked.open...i/riv/nazevZdroje	Proceedings of the 6th Multinational Congress on Microscopy - European Extension.
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	Multichannel spectro-microscopy with slow and Auger electrons
http://linked.open...UplatneniVysledku	2003
http://linked.open...iv/tvurceVysledku	Müllerová, Ilona Frank, Luděk
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2003-06-01 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Croatian Society for Electron Microscopy

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