About: Set of experimental methods for scale-linearity verification in laser interferometers with nanometer resolution.     Goto   Sponge   NotDistinct   Permalink

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Description
  • We present three methods of scale-linearity verification for high-resolution laser interferometers. Methods are scoped to Michelson type interferometer where detection technique with signals in quadrature supported by a single-frequency He-Ne laser is used. Theory, experimental implementation, and measured results of each method are summarized. A short overview of principle of quadrature detection system and digital correction of the scale non-linearity is included also. The contribution highlights main difficulties arisen from each presented method.
  • We present three methods of scale-linearity verification for high-resolution laser interferometers. Methods are scoped to Michelson type interferometer where detection technique with signals in quadrature supported by a single-frequency He-Ne laser is used. Theory, experimental implementation, and measured results of each method are summarized. A short overview of principle of quadrature detection system and digital correction of the scale non-linearity is included also. The contribution highlights main difficulties arisen from each presented method. (en)
Title
  • Set of experimental methods for scale-linearity verification in laser interferometers with nanometer resolution.
  • Set of experimental methods for scale-linearity verification in laser interferometers with nanometer resolution. (en)
skos:prefLabel
  • Set of experimental methods for scale-linearity verification in laser interferometers with nanometer resolution.
  • Set of experimental methods for scale-linearity verification in laser interferometers with nanometer resolution. (en)
skos:notation
  • RIV/68081731:_____/02:12020131!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany
  • 290 ; 297
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA102/02/1318), P(GP102/02/P122), P(IAB2065001), P(IBS2065009), Z(AV0Z2065902)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 663382
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/02:12020131
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Michelson interferometer; scale-linearity; PZT mechanical (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [CCB80C042860]
http://linked.open...v/mistoKonaniAkce
  • Novosibirsk [RU]
http://linked.open...i/riv/mistoVydani
  • Novosibirsk
http://linked.open...i/riv/nazevZdroje
  • Proceedings of SPIE - The International society for optical engineering.
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Číp, Ondřej
  • Petrů, František
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • SPIE
https://schema.org/isbn
  • 0-8194-4686-6
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