About: Characterization of the boundaries of thin films of TiO.sub.2./sub. by atomic force microscopy and optical methods.

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Characterization of the boundaries of thin films of TiO.sub.2./sub. by atomic force microscopy and optical methods. Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper slight roughness of the upper boundaries of TiO.sub.2./sub.thin films prepared on substrates formed by single-crystal silicon in studied. Atomic force microscopy (AFM) and an optical method based on combining variable-angle spectroscopic ellipsometry and near-normal spectroscopicreflectometry are used for this purpose. It is shown that the values of the basic statistical quantities characterizing this roughness depend quitestrongly on the values of the thicknesses of these films (they increase with increasing thickness). Differences observed between the values of the basic statistical parameters determined by AFM and the optical method are explained. It is also shown that the TiO.sub.2./sub. films exhibit an inhomogeneity represented by a profile of the complex refractive index. In this paper slight roughness of the upper boundaries of TiO.sub.2./sub.thin films prepared on substrates formed by single-crystal silicon in studied. Atomic force microscopy (AFM) and an optical method based on combining variable-angle spectroscopic ellipsometry and near-normal spectroscopicreflectometry are used for this purpose. It is shown that the values of the basic statistical quantities characterizing this roughness depend quitestrongly on the values of the thicknesses of these films (they increase with increasing thickness). Differences observed between the values of the basic statistical parameters determined by AFM and the optical method are explained. It is also shown that the TiO.sub.2./sub. films exhibit an inhomogeneity represented by a profile of the complex refractive index. (en)
Title	Characterization of the boundaries of thin films of TiO.sub.2./sub. by atomic force microscopy and optical methods. Characterization of the boundaries of thin films of TiO.sub.2./sub. by atomic force microscopy and optical methods. (en)
skos:prefLabel	Characterization of the boundaries of thin films of TiO.sub.2./sub. by atomic force microscopy and optical methods. Characterization of the boundaries of thin films of TiO.sub.2./sub. by atomic force microscopy and optical methods. (en)
skos:notation	RIV/68081731:_____/02:12020071!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany	759 ; 762
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA101/01/1104), Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika	N/A
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Pokorný, Pavel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	640652
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/02:12020071
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	optical characterization; TiO.sub.2./sub. thin films; bonduary roughness (en)
http://linked.open.../riv/klicoveSlovo	optical characterization TiO.sub.2./sub. thin films bonduary roughness
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[AFA0315BAF01]
http://linked.open...i/riv/nazevZdroje	Surface and interface analysis
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	Realisation of thelaboratory instrument for surface roughness measurement by holographic interferometry
http://linked.open...UplatneniVysledku	2002
http://linked.open...v/svazekPeriodika	34
http://linked.open...iv/tvurceVysledku	Klapetek, P. Pokorný, Pavel Franta, D. Ohlídal, I.
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
issn	0142-2421
number of pages	4 (xsd:int)

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 48 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software