About: Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control.     Goto   Sponge   NotDistinct   Permalink

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Description
  • The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached.
  • The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached. (en)
Title
  • Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control.
  • Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control. (en)
skos:prefLabel
  • Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control.
  • Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control. (en)
skos:notation
  • RIV/68081731:_____/01:12010035!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany
  • 333;338
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(AV0Z2065902)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 699333
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/01:12010035
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • micropositioning; PID controller; interferometry measurements (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [2A365D33B548]
http://linked.open...v/mistoKonaniAkce
  • Velké Losiny [CZ]
http://linked.open...i/riv/mistoVydani
  • Washington
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics (Proc. SPIE 4356).
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Číp, Ondřej
  • Mikel, Břetislav
  • Harna, Z.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • SPIE-The International Society for Optical Engineering
https://schema.org/isbn
  • 0-8194-4047-7
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