About: Scanning Electron Microscopy of Nonconductive Specimens at Critical Energies in a Cathode Lens System.     Goto   Sponge   NotDistinct   Permalink

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Description
  • A method for scanning electron microscopy imaging of nonconductive specimens, based on measurement and utilisation of a critical energy, is described in detail together with examples of its application. The critical energy, at which the total electron yield curve crosses the unit level, is estimated on the basis of measurement of the image signal development from the beginning of irradiation. This approach, concentrated onto the detected signal as the only quantity crucial for the given purpose of acquiring a noncharged micrograph, evades consequences of any changes in an irradiated specimen that influence the total electron yield curve and possibly also the critical energy value. Implementation of the automated method, realised using a cathode lens-equipped scanning electron microsope (SEM), enables one to establish a mean rate of charging over the field of view and its dependence on the electron landing energy. This dependence enables one to determine the energy of a minimum damage of the image of t
  • A method for scanning electron microscopy imaging of nonconductive specimens, based on measurement and utilisation of a critical energy, is described in detail together with examples of its application. The critical energy, at which the total electron yield curve crosses the unit level, is estimated on the basis of measurement of the image signal development from the beginning of irradiation. This approach, concentrated onto the detected signal as the only quantity crucial for the given purpose of acquiring a noncharged micrograph, evades consequences of any changes in an irradiated specimen that influence the total electron yield curve and possibly also the critical energy value. Implementation of the automated method, realised using a cathode lens-equipped scanning electron microsope (SEM), enables one to establish a mean rate of charging over the field of view and its dependence on the electron landing energy. This dependence enables one to determine the energy of a minimum damage of the image of t (en)
Title
  • Scanning Electron Microscopy of Nonconductive Specimens at Critical Energies in a Cathode Lens System.
  • Scanning Electron Microscopy of Nonconductive Specimens at Critical Energies in a Cathode Lens System. (en)
skos:prefLabel
  • Scanning Electron Microscopy of Nonconductive Specimens at Critical Energies in a Cathode Lens System.
  • Scanning Electron Microscopy of Nonconductive Specimens at Critical Energies in a Cathode Lens System. (en)
skos:notation
  • RIV/68081731:_____/01:12010016!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany
  • 36;50
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/96/0961), P(GA202/99/0008), Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika
  • 1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 695265
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/01:12010016
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • scanning electron microscopy; specimen charging; nonconductive specimens (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [2F13EA15A518]
http://linked.open...i/riv/nazevZdroje
  • Scanning
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 23
http://linked.open...iv/tvurceVysledku
  • Müllerová, Ilona
  • Frank, Luděk
  • Zadražil, Martin
http://linked.open...n/vavai/riv/zamer
issn
  • 0161-0457
number of pages
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