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Description
  • Je podána zpráva o vývoji miniaturního (délka 9 cm a průměr 4,5 cm) elektrostatického autoemisního osvětlovacího systému pro použití při analýze povrchů a práci na velmi nízkých energiích. Systém fokusuje svazek elektronů v energiovém rozsahu 1 až 10000 eV použitím režimu katodové čočky. Režim katodové čočky používá detektor elektronů typu in-lens, umístěný mezi kondenzor a objektiv. Pro pracovní vzdálenost 5 mm a energii svazku elektronů 5 keV byl vypočten průměr stopy svazku 80 nm a proud svazku v řádu 10-9 A. Je-li systém provozován v režimu katodové čočky, předpokládá se průměr stopy pod 250 nm při energii 10 event. (cs)
  • We report on the development of a small size (9 cm in length and 4.5 in diameter) all electrostatic field emission column for use in surface analysis and very low energy studies. The column focuses a beam of electrons over the energy range of 1-10,000 eV through the use of the cathode lens mode. The cathode lens mode employs an in-lens electron detector, which is placed between the gun lens and the objective lens. An electron beam diameterof 80 nm and beam current of order 10-9 A are predicted for a working distance of 5 mm and electron beam energy of 5 keV. When the column is operated in the cathode lens mode, an electron beam diameter <250 nm at 10 eV is expected.
  • We report on the development of a small size (9 cm in length and 4.5 in diameter) all electrostatic field emission column for use in surface analysis and very low energy studies. The column focuses a beam of electrons over the energy range of 1-10,000 eV through the use of the cathode lens mode. The cathode lens mode employs an in-lens electron detector, which is placed between the gun lens and the objective lens. An electron beam diameterof 80 nm and beam current of order 10-9 A are predicted for a working distance of 5 mm and electron beam energy of 5 keV. When the column is operated in the cathode lens mode, an electron beam diameter <250 nm at 10 eV is expected. (en)
Title
  • Osvětlovací systém s velmi pomalými elektrony pro studium povrchů (cs)
  • A very low energy electron column for surface studies
  • A very low energy electron column for surface studies (en)
skos:prefLabel
  • Osvětlovací systém s velmi pomalými elektrony pro studium povrchů (cs)
  • A very low energy electron column for surface studies
  • A very low energy electron column for surface studies (en)
skos:notation
  • RIV/68081731:_____/01:00205547!RIV08-AV0-68081731
http://linked.open.../vavai/riv/strany
  • 111 ; 114
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(AV0Z2065902)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 672381
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/01:00205547
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • electrostatic; low energy; surface analysis (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [5AE0D8798D4B]
http://linked.open...v/mistoKonaniAkce
  • Dundee
http://linked.open...i/riv/mistoVydani
  • Bristol
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the Institute of Physics electron microscopy and analysis group conference
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Müllerová, Ilona
  • Frank, Luděk
  • El-Gomati, M.
  • Romanovský, V.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Institute of Physics Publishing
https://schema.org/isbn
  • 0-7503-0812-5
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