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  • This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 μm and their height was about 2 μm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.
  • This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 μm and their height was about 2 μm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling. (en)
Title
  • Determination of mechanical properties from microcompression test
  • Determination of mechanical properties from microcompression test (en)
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  • Determination of mechanical properties from microcompression test
  • Determination of mechanical properties from microcompression test (en)
skos:notation
  • RIV/68081723:_____/12:00387901!RIV13-AV0-68081723
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, S
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 130610
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  • RIV/68081723:_____/12:00387901
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  • microcompression; thin film properties; focused ion beam; Young modulus; FEM (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [918AFED4D1A2]
http://linked.open...v/mistoKonaniAkce
  • Svratka
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  • Prague
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  • Engineering Mechanics 2012
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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  • Kruml, Tomáš
  • Náhlík, Luboš
  • Kuběna, Ivo
  • Petráčková, Klára
  • Truhlář, Michal
http://linked.open...vavai/riv/typAkce
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number of pages
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  • ITAM AS CR, v. v. i.
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  • 978-80-86246-40-6
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