About: Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers

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About: Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Plazmochemická depozice vrstev z hexametyldisiloxanu a oktametyltetrasiloxanu. Siloxanové polymery. (cs) Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers.Siloxane polymers. Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers.Siloxane polymers. (en)
Title	Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers Plazmochemická depozice vrstev z hexametyldisiloxanu a oktametyltetrasiloxanu (cs) Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers (en)
skos:prefLabel	Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers Plazmochemická depozice vrstev z hexametyldisiloxanu a oktametyltetrasiloxanu (cs) Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers (en)
skos:notation	RIV/68081723:_____/07:00099989!RIV08-AV0-68081723
http://linked.open.../vavai/riv/strany	459;459
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(AV0Z20410507)
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Buršík, Jiří
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fyziky materiálů AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	441500
http://linked.open...ai/riv/idVysledku	RIV/68081723:_____/07:00099989
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	PECVD; HMDSO; OMCTS (en)
http://linked.open.../riv/klicoveSlovo	PECVD HMDSO OMCTS
http://linked.open...ontrolniKodProRIV	[5E525E1DD1C8]
http://linked.open...v/mistoKonaniAkce	Kyoto
http://linked.open...i/riv/mistoVydani	Kyoto
http://linked.open...i/riv/nazevZdroje	18th International Symposium on Plasma Chemistry
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Buršík, Jiří Buršíková, V. Klapetek, P. Franta, D. Zajíčková, L. Kučerová, Z. Sťahel, P.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2007-08-26 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Physical properties of advanced materials in relation to their microstructure and processing
number of pages	1 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Kyoto University
https://schema.org/isbn	978-4-9903773-2-8

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