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Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers
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An Entity of Type :
http://linked.opendata.cz/ontology/domain/vavai/Vysledek
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linked.opendata.cz
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skos:Concept
http://linked.opendata.cz/ontology/domain/vavai/Vysledek
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rdf:type
skos:Concept
http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description
Plazmochemická depozice vrstev z hexametyldisiloxanu a oktametyltetrasiloxanu. Siloxanové polymery.
(cs)
Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers.Siloxane polymers.
Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers.Siloxane polymers.
(en)
Title
Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers
Plazmochemická depozice vrstev z hexametyldisiloxanu a oktametyltetrasiloxanu
(cs)
Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers
(en)
skos:prefLabel
Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers
Plazmochemická depozice vrstev z hexametyldisiloxanu a oktametyltetrasiloxanu
(cs)
Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers
(en)
skos:notation
RIV/68081723:_____/07:00099989!RIV08-AV0-68081723
http://linked.open.../vavai/riv/strany
459;459
http://linked.open...avai/riv/aktivita
Z
http://linked.open...avai/riv/aktivity
Z(AV0Z20410507)
http://linked.open...vai/riv/dodaniDat
2008
http://linked.open...aciTvurceVysledku
Buršík, Jiří
http://linked.open.../riv/druhVysledku
D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju
S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele
Ústav fyziky materiálů AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku
441500
http://linked.open...ai/riv/idVysledku
RIV/68081723:_____/07:00099989
http://linked.open...riv/jazykVysledku
eng - angličtina
http://linked.open.../riv/klicovaSlova
PECVD; HMDSO; OMCTS
(en)
http://linked.open.../riv/klicoveSlovo
PECVD
HMDSO
OMCTS
http://linked.open...ontrolniKodProRIV
[5E525E1DD1C8]
http://linked.open...v/mistoKonaniAkce
Kyoto
http://linked.open...i/riv/mistoVydani
Kyoto
http://linked.open...i/riv/nazevZdroje
18th International Symposium on Plasma Chemistry
http://linked.open...in/vavai/riv/obor
BL
http://linked.open...ichTvurcuVysledku
1
(
xsd:int
)
http://linked.open...cetTvurcuVysledku
7
(
xsd:int
)
http://linked.open...UplatneniVysledku
2007
http://linked.open...iv/tvurceVysledku
Buršík, Jiří
Buršíková, V.
Klapetek, P.
Franta, D.
Zajíčková, L.
Kučerová, Z.
Sťahel, P.
http://linked.open...vavai/riv/typAkce
WRD - Světová
http://linked.open.../riv/zahajeniAkce
2007-08-26
(
xsd:date
)
http://linked.open...n/vavai/riv/zamer
Physical properties of advanced materials in relation to their microstructure and processing
number of pages
1
(
xsd:int
)
http://purl.org/ne...btex#hasPublisher
Kyoto University
https://schema.org/isbn
978-4-9903773-2-8
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