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Description
  • We are describing two strategies for controlled (geometry and dimension) preparation of metal micro-nano structures. Both techniques are based on photolithographic processes with selective pattern transfer. First technique utilizes agarose gel containing photosensitive silver chloride as the photosensitive layer. Silver structures are formed after irradiation of the gel through the photolithographic mask which defines shape of the resulting structures. Second approach utilizes photolithographic process to form particles from vacuum deposited thin metal layer deposited over soluble sacrificial layer.
  • We are describing two strategies for controlled (geometry and dimension) preparation of metal micro-nano structures. Both techniques are based on photolithographic processes with selective pattern transfer. First technique utilizes agarose gel containing photosensitive silver chloride as the photosensitive layer. Silver structures are formed after irradiation of the gel through the photolithographic mask which defines shape of the resulting structures. Second approach utilizes photolithographic process to form particles from vacuum deposited thin metal layer deposited over soluble sacrificial layer. (en)
Title
  • Photolithographic technique for controlled fabrication of metal structures
  • Photolithographic technique for controlled fabrication of metal structures (en)
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  • Photolithographic technique for controlled fabrication of metal structures
  • Photolithographic technique for controlled fabrication of metal structures (en)
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  • RIV/68081715:_____/12:00386193!RIV13-AV0-68081715
http://linked.open...avai/riv/aktivita
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  • I, P(GAP301/11/2055), P(GBP206/12/G014)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 158563
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  • RIV/68081715:_____/12:00386193
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  • metal microstructures; microfabrication; photolithography (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [881342F832B0]
http://linked.open...v/mistoKonaniAkce
  • Brno
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  • Brno
http://linked.open...i/riv/nazevZdroje
  • CECE 2012. 9th International Interdisciplinary Meeting on Bioanalysis
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  • Foret, František
  • Jusková, Petra
  • Hegrová, Jitka
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • Ústav analytické chemie AV ČR, v. v. i
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  • 978-80-904959-1-3
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