About: Synthesis of High Purity Si3N4 and SiC Powders by CVD Method.     Goto   Sponge   NotDistinct   Permalink

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Description
  • Fine, sub-micrometer, amorphous powders of SiC and Si3N4 have been prepared from SiH4 - NH3 and C2H2 - SiH4 gaseous systems respectively, in a tubular flow reactor. The particle size of powders prepared at 1373 K is in the range of 50 - 150 nm and 10 to 100 nm for Si3N4 and SiC, respectively. The content of metal impurities (Al, Cr, Cu and Fe) in the presented powders is one order of magnitude lower compared to the commercially available powders prepared by other methods.
  • Fine, sub-micrometer, amorphous powders of SiC and Si3N4 have been prepared from SiH4 - NH3 and C2H2 - SiH4 gaseous systems respectively, in a tubular flow reactor. The particle size of powders prepared at 1373 K is in the range of 50 - 150 nm and 10 to 100 nm for Si3N4 and SiC, respectively. The content of metal impurities (Al, Cr, Cu and Fe) in the presented powders is one order of magnitude lower compared to the commercially available powders prepared by other methods. (en)
Title
  • Synthesis of High Purity Si3N4 and SiC Powders by CVD Method.
  • Synthesis of High Purity Si3N4 and SiC Powders by CVD Method. (en)
skos:prefLabel
  • Synthesis of High Purity Si3N4 and SiC Powders by CVD Method.
  • Synthesis of High Purity Si3N4 and SiC Powders by CVD Method. (en)
skos:notation
  • RIV/68081715:_____/03:25033047!RIV/2004/AV0/A25004/N
http://linked.open.../vavai/riv/strany
  • 88;93
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(AV0Z4031919)
http://linked.open...iv/cisloPeriodika
  • 3
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 630051
http://linked.open...ai/riv/idVysledku
  • RIV/68081715:_____/03:25033047
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • high purity ceramics; trace element analysis; atomic absorption spectrometry (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • SK - Slovenská republika
http://linked.open...ontrolniKodProRIV
  • [E7BBD7E5B929]
http://linked.open...i/riv/nazevZdroje
  • Ceramics - Silikáty
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 47
http://linked.open...iv/tvurceVysledku
  • Dočekal, Bohumil
  • Šajgalík, P.
  • Halamka, M.
  • Kavecký, Š.
  • Madejová, J.
http://linked.open...n/vavai/riv/zamer
issn
  • 0862-5468
number of pages
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