About: Sputtering of a silicon surface: Preferential sputtering of surface impurities

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present molecular-dynamics simulations of the sputtering of an impurity atom off a Si 2 x 1 (100) surface by 2 keV Ar ions. The impurity is characterized by its mass and its binding energy to the Si substrate. We find that sputtering strongly decreases with the mass and even more strongly with the binding energy of the impurity atom to the matrix. The velocity of the impurity perpendicular to the surface is reduced with increasing impurity mass and binding energy. In terms of available ionization theories we can conclude that heavier impurities will have a smaller ionization probability We present molecular-dynamics simulations of the sputtering of an impurity atom off a Si 2 x 1 (100) surface by 2 keV Ar ions. The impurity is characterized by its mass and its binding energy to the Si substrate. We find that sputtering strongly decreases with the mass and even more strongly with the binding energy of the impurity atom to the matrix. The velocity of the impurity perpendicular to the surface is reduced with increasing impurity mass and binding energy. In terms of available ionization theories we can conclude that heavier impurities will have a smaller ionization probability (en)
Title	Sputtering of a silicon surface: Preferential sputtering of surface impurities Sputtering of a silicon surface: Preferential sputtering of surface impurities (en)
skos:prefLabel	Sputtering of a silicon surface: Preferential sputtering of surface impurities Sputtering of a silicon surface: Preferential sputtering of surface impurities (en)
skos:notation	RIV/67985882:_____/13:00396645!RIV14-AV0-67985882
http://linked.open...avai/riv/aktivita	I
http://linked.open...avai/riv/aktivity	I
http://linked.open...iv/cisloPeriodika	303
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Lörinčík, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fotoniky a elektroniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	107268
http://linked.open...ai/riv/idVysledku	RIV/67985882:_____/13:00396645
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Sputtering; Molecular dynamics; SIMS (en)
http://linked.open.../riv/klicoveSlovo	Molecular dynamics SIMS Sputtering
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[E1A29086C4D2]
http://linked.open...i/riv/nazevZdroje	Nuclear Instruments & Methods in Physics Research Section B
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...UplatneniVysledku	2013
http://linked.open...iv/tvurceVysledku	Lorinčík, Jan Urbassek, H. M. Nietiadi, M. L. Rosandi, Y.
http://linked.open...ain/vavai/riv/wos	000320151600048
issn	0168-583X
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.nimb.2012.09.023

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