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  • A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either [image omitted] or Cs+ primary ions with or without D2O flooding and detecting secondary ions of Si +/-, SiH +/-, O-, SiD-, OD-. A parallel detection of near masses of 29Si and 28SiH or 18O and 16OD was demonstrated at a sensitivity level 230 counts/s.
  • A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either [image omitted] or Cs+ primary ions with or without D2O flooding and detecting secondary ions of Si +/-, SiH +/-, O-, SiD-, OD-. A parallel detection of near masses of 29Si and 28SiH or 18O and 16OD was demonstrated at a sensitivity level 230 counts/s. (en)
Title
  • Testing of a Micro Faraday Cup Array for Ion Detection in SIMS
  • Testing of a Micro Faraday Cup Array for Ion Detection in SIMS (en)
skos:prefLabel
  • Testing of a Micro Faraday Cup Array for Ion Detection in SIMS
  • Testing of a Micro Faraday Cup Array for Ion Detection in SIMS (en)
skos:notation
  • RIV/67985882:_____/11:00367803!RIV12-AV0-67985882
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ME 894), Z(AV0Z20670512)
http://linked.open...iv/cisloPeriodika
  • 6
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 234904
http://linked.open...ai/riv/idVysledku
  • RIV/67985882:_____/11:00367803
http://linked.open...riv/jazykVysledku
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  • Faraday cup; SIMS; Capacitance transimpedance amplifier; Ion detection (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [FBDFCC725CA0]
http://linked.open...i/riv/nazevZdroje
  • Analytical Letters
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http://linked.open...vavai/riv/projekt
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  • 44
http://linked.open...iv/tvurceVysledku
  • Williams, P.
  • Lorinčík, Jan
  • Denton, M. B.
  • Sperline, R. P.
  • Young, E. T.
http://linked.open...ain/vavai/riv/wos
  • 000289246200008
http://linked.open...n/vavai/riv/zamer
issn
  • 0003-2719
number of pages
http://bibframe.org/vocab/doi
  • 10.1080/00032719.2010.511739
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