About: On the effect of oxygen flooding on the detection of noble gas ions in a SIMS instrument

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About: On the effect of oxygen flooding on the detection of noble gas ions in a SIMS instrument Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We have investigated the report by Desgranges and Pasquet (2004) [1] that O2 gas flooding in a secondary ion mass spectrometer could enhance by a factor of about 5 the Xe+ ion yield for a Xe implant in UO2 sputtered by O2+ primary ions. For a Xe implant in Si sputtered by O2+ primary ions and for Xe+ sputtering of silicon in steady state, O2 gas flooding reduced the Xe+ ion signal by a factor of about 2, presumably due to loss of Xe+ by resonant charge exchange with gas-phase oxygen molecules. The yield of a Kr co-implant in Si was unaffected by oxygen flooding. However, we demonstrate that for steady-state Ar+ sputtering of uranium, the Ar+ ion yield can be increased by a factor of 1.7 by oxygen flooding. We have investigated the report by Desgranges and Pasquet (2004) [1] that O2 gas flooding in a secondary ion mass spectrometer could enhance by a factor of about 5 the Xe+ ion yield for a Xe implant in UO2 sputtered by O2+ primary ions. For a Xe implant in Si sputtered by O2+ primary ions and for Xe+ sputtering of silicon in steady state, O2 gas flooding reduced the Xe+ ion signal by a factor of about 2, presumably due to loss of Xe+ by resonant charge exchange with gas-phase oxygen molecules. The yield of a Kr co-implant in Si was unaffected by oxygen flooding. However, we demonstrate that for steady-state Ar+ sputtering of uranium, the Ar+ ion yield can be increased by a factor of 1.7 by oxygen flooding. (en)
Title	On the effect of oxygen flooding on the detection of noble gas ions in a SIMS instrument On the effect of oxygen flooding on the detection of noble gas ions in a SIMS instrument (en)
skos:prefLabel	On the effect of oxygen flooding on the detection of noble gas ions in a SIMS instrument On the effect of oxygen flooding on the detection of noble gas ions in a SIMS instrument (en)
skos:notation	RIV/67985882:_____/10:00349994!RIV11-AV0-67985882
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(AV0Z20670512)
http://linked.open...iv/cisloPeriodika	17-18
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Lörinčík, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fotoniky a elektroniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	276849
http://linked.open...ai/riv/idVysledku	RIV/67985882:_____/10:00349994
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	SIMS; noble gases; uranium (en)
http://linked.open.../riv/klicoveSlovo	uranium noble gases SIMS
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[CBB4E5FEB0D8]
http://linked.open...i/riv/nazevZdroje	Nuclear Instruments & Methods in Physics Research Section B
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	268
http://linked.open...iv/tvurceVysledku	Williams, P. Lorinčík, Jan Franzreb, K. Sobers Jr., R. C.
http://linked.open...ain/vavai/riv/wos	000281498900033
http://linked.open...n/vavai/riv/zamer	Materiály, struktury, systémy a signály v elektronice, optoelektronice a fotonice
issn	0168-583X
number of pages	8 (xsd:int)

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