About: Atmospheric Pressure Chemical Vapour Deposition of Polycarbosilane Films via UV Laser Polymerization of Ethynyltrimethylsilane.     Goto   Sponge   NotDistinct   Permalink

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Description
  • ArF laser-induced polymerization of gaseous ethynyltrimethylsilane at atmospheric pressure of He represents a convenient way of efficient chemical vapour deposition of polycarbosilane films. The films are produced at ambient temperature of metals, quartz and glass, and are adhesive to these substrates, which makes this process promising for fabrication of protective coatings on thermally unstable surfaces.
  • ArF laser-induced polymerization of gaseous ethynyltrimethylsilane at atmospheric pressure of He represents a convenient way of efficient chemical vapour deposition of polycarbosilane films. The films are produced at ambient temperature of metals, quartz and glass, and are adhesive to these substrates, which makes this process promising for fabrication of protective coatings on thermally unstable surfaces. (en)
Title
  • Atmospheric Pressure Chemical Vapour Deposition of Polycarbosilane Films via UV Laser Polymerization of Ethynyltrimethylsilane.
  • Atmospheric Pressure Chemical Vapour Deposition of Polycarbosilane Films via UV Laser Polymerization of Ethynyltrimethylsilane. (en)
skos:prefLabel
  • Atmospheric Pressure Chemical Vapour Deposition of Polycarbosilane Films via UV Laser Polymerization of Ethynyltrimethylsilane.
  • Atmospheric Pressure Chemical Vapour Deposition of Polycarbosilane Films via UV Laser Polymerization of Ethynyltrimethylsilane. (en)
skos:notation
  • RIV/67985858:_____/02:27020051!RIV/2003/AV0/A27003/N
http://linked.open.../vavai/riv/strany
  • 129;134
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ME 192), Z(AV0Z4032918), Z(AV0Z4040901), Z(AV0Z4072921)
http://linked.open...iv/cisloPeriodika
  • 2-3
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 639142
http://linked.open...ai/riv/idVysledku
  • RIV/67985858:_____/02:27020051
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • polycarbosilane films; laser; chemical vapour deposition (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV
  • [F52FB88D7AF0]
http://linked.open...i/riv/nazevZdroje
  • Surface and Coating Technology
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 149
http://linked.open...iv/tvurceVysledku
  • Pola, Josef
  • Šubrt, Jan
  • Morita, H.
  • Bastl, Zdeněk
  • Ouchi, A.
http://linked.open...n/vavai/riv/zamer
issn
  • 0257-8972
number of pages
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