About: A new method for mechanical testing of thin films: Applicationto aluminum

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A new method for measuring plastic properties of thin films deposited on a substrate is presented. Micrometric cylindrical specimens with the axis perpendicular to the film surface were prepared by milling out the surrounding material using the focused ion beam technique. Such specimens were deformed by means of a nanoindenter outfitted with a flat diamond tip. An equivalent to the macroscopic compressive curve was obtained.Elastic modulus and hardness of the film were then measured using a Berkovich tip.The precise knowledge of the gage length and the independent measurement of elastic properties enable the accurate determination of the stress#strain curve. As compared with the results published in the literature on the specimens with the same dimensions, the studied material deforms less heterogeneously, probably as a consequence of the symmetric crystallographic orientation of the specimens. A new method for measuring plastic properties of thin films deposited on a substrate is presented. Micrometric cylindrical specimens with the axis perpendicular to the film surface were prepared by milling out the surrounding material using the focused ion beam technique. Such specimens were deformed by means of a nanoindenter outfitted with a flat diamond tip. An equivalent to the macroscopic compressive curve was obtained.Elastic modulus and hardness of the film were then measured using a Berkovich tip.The precise knowledge of the gage length and the independent measurement of elastic properties enable the accurate determination of the stress#strain curve. As compared with the results published in the literature on the specimens with the same dimensions, the studied material deforms less heterogeneously, probably as a consequence of the symmetric crystallographic orientation of the specimens. (en)
Title	A new method for mechanical testing of thin films: Applicationto aluminum A new method for mechanical testing of thin films: Applicationto aluminum (en)
skos:prefLabel	A new method for mechanical testing of thin films: Applicationto aluminum A new method for mechanical testing of thin films: Applicationto aluminum (en)
skos:notation	RIV/61989592:15310/09:00010957!RIV10-AV0-15310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(KAN301370701), Z(AV0Z10100522), Z(AV0Z20410507)
http://linked.open...iv/cisloPeriodika	4
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Čtvrtlík, Radim Stranyánek, Martin
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Palackého v Olomouci / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	301399
http://linked.open...ai/riv/idVysledku	RIV/61989592:15310/09:00010957
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Al; film; stress/strain relationship; scanning electron microscopy; hardness (en)
http://linked.open.../riv/klicoveSlovo	Al stress/strain relationship film hardness scanning electron microscopy
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[70D3EE599F75]
http://linked.open...i/riv/nazevZdroje	Journal of Materials Research
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanostructured Macroscopic Systems - Technology and Characterisation
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	24
http://linked.open...iv/tvurceVysledku	Stranyánek, Martin Čtvrtlík, Radim Pánek, P. Boháč, P. Kruml, T.
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology Physical properties of advanced materials in relation to their microstructure and processing
issn	0884-2914
number of pages	8 (xsd:int)
http://localhost/t...ganizacniJednotka	15310

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