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  • The interferometrical measuring method of the optical thickness of thin films is presented in this report. The main part of the theory of reflectivity of thin films is presented with the references on the literature. The measurement of optical thickness of the layers is realized by Michalson's interferometer. Interferogram of measured sample where one half of the flat is with the layer and the other one without the layer is recorded from the screen by CCD camera. The video-signal of two rows of the intensity distribution from the part with layer and without the layer is due to computer processing filtered by FFT and the phase change of the two periodic %22continuous%22 functions is evaluated by the first and second derivation. This phase change enables to determine the path difference of the light and finally the thickness of the layer.
  • The interferometrical measuring method of the optical thickness of thin films is presented in this report. The main part of the theory of reflectivity of thin films is presented with the references on the literature. The measurement of optical thickness of the layers is realized by Michalson's interferometer. Interferogram of measured sample where one half of the flat is with the layer and the other one without the layer is recorded from the screen by CCD camera. The video-signal of two rows of the intensity distribution from the part with layer and without the layer is due to computer processing filtered by FFT and the phase change of the two periodic %22continuous%22 functions is evaluated by the first and second derivation. This phase change enables to determine the path difference of the light and finally the thickness of the layer. (en)
Title
  • Measurement of thin films by computer processed video-signal
  • Measurement of thin films by computer processed video-signal (en)
skos:prefLabel
  • Measurement of thin films by computer processed video-signal
  • Measurement of thin films by computer processed video-signal (en)
skos:notation
  • RIV/61989592:15310/00:00001001!RIV/2001/MSM/153101/N
http://linked.open.../vavai/riv/strany
  • 139
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 153100007)
http://linked.open...iv/cisloPeriodika
  • NA
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Bartoněk, Luděk
  • Keprt, Jiří
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 716866
http://linked.open...ai/riv/idVysledku
  • RIV/61989592:15310/00:00001001
http://linked.open...riv/jazykVysledku
http://linked.open...ontrolniKodProRIV
  • [DAEC57A69EE4]
http://linked.open...i/riv/nazevZdroje
  • Acta Universitatis Palackianae Olomucensis, Facultas Rerum Naturalium, Physica
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 39
http://linked.open...iv/tvurceVysledku
  • Bartoněk, Luděk
  • Keprt, Jiří
http://linked.open...n/vavai/riv/zamer
issn
  • 0231-9772
number of pages
http://localhost/t...ganizacniJednotka
  • 15310
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