About: Application of infrared ATR ellipsometry for measurement of solid samples: Calibration procedure

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Application of infrared ATR ellipsometry for measurement of solid samples: Calibration procedure Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Attenuated total reflection (ATR) is widely used in infrared spectral range for measurement of surface properties of solid samples, powders, and liquids. In this paper we use a commercial Fourier-transform infrared (FTIR) spectrometer Vertex 70v from Bruker company equipped with the ATR Golden Gate accessory from Specac. To increase sensitivity of the method we included infrared polarizer and analyzer, which enable measurement of the reflected amplitudes ratio and the phase differences between p- and s-polarizations in the frame of the ATR ellipsometry. Procedure of ellipsometric angles measurement is proposed using data acquisition at several azimuthal angles of polarizers. Spectral dependence of real polarizer extinction ratio, partial polarization of beam coming from the interferometer and polarization sensitivity of infrared detector are presented. Attenuated total reflection (ATR) is widely used in infrared spectral range for measurement of surface properties of solid samples, powders, and liquids. In this paper we use a commercial Fourier-transform infrared (FTIR) spectrometer Vertex 70v from Bruker company equipped with the ATR Golden Gate accessory from Specac. To increase sensitivity of the method we included infrared polarizer and analyzer, which enable measurement of the reflected amplitudes ratio and the phase differences between p- and s-polarizations in the frame of the ATR ellipsometry. Procedure of ellipsometric angles measurement is proposed using data acquisition at several azimuthal angles of polarizers. Spectral dependence of real polarizer extinction ratio, partial polarization of beam coming from the interferometer and polarization sensitivity of infrared detector are presented. (en)
Title	Application of infrared ATR ellipsometry for measurement of solid samples: Calibration procedure Application of infrared ATR ellipsometry for measurement of solid samples: Calibration procedure (en)
skos:prefLabel	Application of infrared ATR ellipsometry for measurement of solid samples: Calibration procedure Application of infrared ATR ellipsometry for measurement of solid samples: Calibration procedure (en)
skos:notation	RIV/61989100:27360/11:86080393!RIV12-GA0-27360___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(ED0040/01/01), P(FR-TI3/053), P(GAP205/11/2137), Z(MSM6198910016)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Postava, Kamil Pištora, Jaromír Hrabovský, David
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoká škola báňská - Technická univerzita Ostrava / Fakulta metalurgie a materiálového inženýrství
http://linked.open...dnocenehoVysledku	186793
http://linked.open...ai/riv/idVysledku	RIV/61989100:27360/11:86080393
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	FTIR spectrometry; polarization sensitivity; ATR ellipsometry (en)
http://linked.open.../riv/klicoveSlovo	ATR ellipsometry FTIR spectrometry polarization sensitivity
http://linked.open...ontrolniKodProRIV	[A539CEF1ABF9]
http://linked.open...v/mistoKonaniAkce	Praha
http://linked.open...i/riv/mistoVydani	Bellingham
http://linked.open...i/riv/nazevZdroje	Photonics, Devices, and Systems V : conference proceedings : 24-26 August 2011, Prague, Czech Republic
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	*Improvement of magnetic and quality properties of strips from grain oriented electrical steels Magnetophotonic interactions in realistic nanostructures Regional materials science and technology centre
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Hrabovský, David Mrázková, Zuzana Pištora, Jaromír Postava, Kamil
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open...ain/vavai/riv/wos	000297582500028
http://linked.open.../riv/zahajeniAkce	2011-08-24 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Syntéza, struktura a vlastnosti nanomateriálů založených na bázi interkalovaných fylosylikátů
issn	0277-786X
number of pages	7 (xsd:int)
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	978-0-8194-8953-1
http://localhost/t...ganizacniJednotka	27360

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software