About: Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement

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About: Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A method to determine the thickness of a nonabsorbing thin film on an absorbing substrate is presented. A linear relation between the thin-film thickness and the tangent wavelength of the reflectance spectrum for a specific interference order is revealed, which permits the calculation of the thickness provided that the wavelength-dependent optical parameters of the thin film and the substrate are known. The thickness can be calculated precisely from the reflectance spectrum by using one extreme only, as is demonstrated theoretically for SiO2 thin film on a Si substrate. The application of this method is demonstrated experimentally for the same thin-film structure but with different Si substrates. The results are compared with those given by the algebraic fitting method, and very good agreement is confirmed. A method to determine the thickness of a nonabsorbing thin film on an absorbing substrate is presented. A linear relation between the thin-film thickness and the tangent wavelength of the reflectance spectrum for a specific interference order is revealed, which permits the calculation of the thickness provided that the wavelength-dependent optical parameters of the thin film and the substrate are known. The thickness can be calculated precisely from the reflectance spectrum by using one extreme only, as is demonstrated theoretically for SiO2 thin film on a Si substrate. The application of this method is demonstrated experimentally for the same thin-film structure but with different Si substrates. The results are compared with those given by the algebraic fitting method, and very good agreement is confirmed. (en)
Title	Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement (en)
skos:prefLabel	Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement (en)
skos:notation	RIV/61989100:27350/09:00021679!RIV10-MSM-27350___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM6198910016)
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Hlubina, Petr Luňáček, Jiří Luňáčková, Milena
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoká škola báňská - Technická univerzita Ostrava / Hornicko-geologická fakulta
http://linked.open...dnocenehoVysledku	341212
http://linked.open...ai/riv/idVysledku	RIV/61989100:27350/09:00021679
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Thin film thickness; reflectance spectrum; envelopes; tangent wavelengths (en)
http://linked.open.../riv/klicoveSlovo	envelopes Thin film thickness reflectance spectrum tangent wavelengths
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[AB121A28AA80]
http://linked.open...i/riv/nazevZdroje	Applied Optics
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	48
http://linked.open...iv/tvurceVysledku	Hlubina, Petr Luňáček, Jiří Luňáčková, Milena
http://linked.open...ain/vavai/riv/wos	000264210900026
http://linked.open...n/vavai/riv/zamer	Syntéza, struktura a vlastnosti nanomateriálů založených na bázi interkalovaných fylosylikátů
issn	0003-6935
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	27350

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