About: Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials

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About: Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Konvergenční vlastnosti měření kritické dimenze (cs) Spectroscopic ellipsometry SE in the visible/near-UV spectral range is applied to monitor optical critical dimensions of quartz, Si, and Ta gratings, namely, the depth, linewidth, and period. To analyze the SE measurements, the rigorous coupled-wave theory is applied, whose implementation is described in detail, referred to as the Airy-like internal reflection series with the Fourier factorization rules taken into account. It is demonstrated that the Airy-like series implementation of the coupled-wave theory with the factorization rules provides fast convergence of both the simulated SE parameters and the extracted dimensions. The convergence properties are analyzed with respect to the maximum Fourier harmonics retained inside the periodic media and also with respect to the fineness of slicing imperfect Ta wires with paraboloidally curved edges. Spectroscopic ellipsometry SE in the visible/near-UV spectral range is applied to monitor optical critical dimensions of quartz, Si, and Ta gratings, namely, the depth, linewidth, and period. To analyze the SE measurements, the rigorous coupled-wave theory is applied, whose implementation is described in detail, referred to as the Airy-like internal reflection series with the Fourier factorization rules taken into account. It is demonstrated that the Airy-like series implementation of the coupled-wave theory with the factorization rules provides fast convergence of both the simulated SE parameters and the extracted dimensions. The convergence properties are analyzed with respect to the maximum Fourier harmonics retained inside the periodic media and also with respect to the fineness of slicing imperfect Ta wires with paraboloidally curved edges. (en)
Title	Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials (en) Konvergenční vlastnosti měření kritické dimenze (cs)
skos:prefLabel	Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials (en) Konvergenční vlastnosti měření kritické dimenze (cs)
skos:notation	RIV/61989100:27350/06:00016826!RIV08-GA0-27350___
http://linked.open.../vavai/riv/strany	054906-054906
http://linked.open...avai/riv/aktivita	P S Z
http://linked.open...avai/riv/aktivity	P(GA202/06/0531), S, Z(MSM0021620834), Z(MSM6198910016)
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Pištora, Jaromír
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoká škola báňská - Technická univerzita Ostrava / Hornicko-geologická fakulta
http://linked.open...dnocenehoVysledku	469806
http://linked.open...ai/riv/idVysledku	RIV/61989100:27350/06:00016826
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	critical dimension; Spectroscopic ellipsometry; gratings (en)
http://linked.open.../riv/klicoveSlovo	Spectroscopic ellipsometry critical dimension gratings
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[EDA16EC4640B]
http://linked.open...i/riv/nazevZdroje	Journal of Applied Physics
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Reflection and waveguiding effects in magnetic nanostructures
http://linked.open...UplatneniVysledku	2006
http://linked.open...v/svazekPeriodika	100
http://linked.open...iv/tvurceVysledku	Pištora, Jaromír Yamaguchi, T. Antoš, R. Horie, M. Mistrik, J. Otami, Y. Visnovsky, S. Yamaguchi, S.
http://linked.open...n/vavai/riv/zamer	Condensed Matter Physics – New Materials and Technologies Syntéza, struktura a vlastnosti nanomateriálů založených na bázi interkalovaných fylosylikátů
issn	0021-8979
number of pages	11 (xsd:int)
http://localhost/t...ganizacniJednotka	27350

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