About: Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry     Goto   Sponge   NotDistinct   Permalink

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Description
  • Dispersion of ellipsometrical angles analyzed using theoretical model as well as over measured data is presented. Binary multilayer grating is modeled via rigorous coupled wave method. The special attention is devoted to additional oxidation of inter-dot area and to an interaction of finite optical beam with super-long-period structure. The results are discussed in the relation to experimental data.
  • Dispersion of ellipsometrical angles analyzed using theoretical model as well as over measured data is presented. Binary multilayer grating is modeled via rigorous coupled wave method. The special attention is devoted to additional oxidation of inter-dot area and to an interaction of finite optical beam with super-long-period structure. The results are discussed in the relation to experimental data. (en)
Title
  • Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry
  • Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry (en)
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  • Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry
  • Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry (en)
skos:notation
  • RIV/61989100:27350/05:00013355!RIV10-GA0-27350___
http://linked.open...avai/riv/aktivita
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  • P(GA202/03/0776)
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  • 530679
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  • RIV/61989100:27350/05:00013355
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  • multilayer gratings; spectral ellipsometry (en)
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  • [0219850D9D64]
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  • Nitra
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  • Bellingham
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  • Proceedings of SPIE
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  • Pištora, Jaromír
  • Postava, Kamil
  • Vlček, Jaroslav
  • Yamaguchi, Tomuo
  • Brings, Reiner
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
issn
  • 0277-786X
number of pages
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  • SPIE - The International Society for Optical Engineering
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  • 27350
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