About: Influence of component imperfection on null ellipsometry with phase modulation

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A new null ellipsometer has been recently proposed that uses photoelastic modulator (PEM). The phase modulation adds a good signal-to-noise ratio, high sensitivity, and linearity near null positions to the traditional high-precision nulling system. The ellipsometric angles Delta and psi are obtained by azimuth measurement of the analyzer and the polarizer--PEM system, for which the first and second harmonics of modulator frequency cross the zeros. In this paper we discuss influence of component imperfection on precision of null measurement. Particular interest is devoted to azimuth angle error of compensator and modulator. Effect of residual birefringence of PEM is discussed. We show that the null system is insensitive to ellipsometer misadjustment and component imperfections and modulator calibration is not needed. A new null ellipsometer has been recently proposed that uses photoelastic modulator (PEM). The phase modulation adds a good signal-to-noise ratio, high sensitivity, and linearity near null positions to the traditional high-precision nulling system. The ellipsometric angles Delta and psi are obtained by azimuth measurement of the analyzer and the polarizer--PEM system, for which the first and second harmonics of modulator frequency cross the zeros. In this paper we discuss influence of component imperfection on precision of null measurement. Particular interest is devoted to azimuth angle error of compensator and modulator. Effect of residual birefringence of PEM is discussed. We show that the null system is insensitive to ellipsometer misadjustment and component imperfections and modulator calibration is not needed. (en)
Title	Influence of component imperfection on null ellipsometry with phase modulation Influence of component imperfection on null ellipsometry with phase modulation (en)
skos:prefLabel	Influence of component imperfection on null ellipsometry with phase modulation Influence of component imperfection on null ellipsometry with phase modulation (en)
skos:notation	RIV/61989100:27350/05:00013349!RIV10-GA0-27350___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA202/03/0776)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Postava, Kamil Pištora, Jaromír Životský, Ondřej
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoká škola báňská - Technická univerzita Ostrava / Hornicko-geologická fakulta
http://linked.open...dnocenehoVysledku	524648
http://linked.open...ai/riv/idVysledku	RIV/61989100:27350/05:00013349
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	null ellipsometry; phase modulation; imperfect compensator; PEM (en)
http://linked.open.../riv/klicoveSlovo	PEM phase modulation null ellipsometry imperfect compensator
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[A320B93E2EAC]
http://linked.open...i/riv/nazevZdroje	Proceedings of SPIE
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...vavai/riv/projekt	Magneto-optical effects in magnetic nanostructures
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	5856
http://linked.open...iv/tvurceVysledku	Hlubina, Petr Pištora, Jaromír Postava, Kamil Životský, Ondřej Višňovský, Štefan Foldyna, Martin Yamaguchi, Tomuo Maziewski, Andrzej Ossikovski, Razvigor
issn	0277-786X
number of pages	9 (xsd:int)
http://localhost/t...ganizacniJednotka	27350

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