About: Null ellipsometer with phase modulation

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Nulovací elipsometr s fázovou modulací (cs) A new null ellipsometer is described that uses photoelasticmodulator (PEM). The phase modulation adds a good signal-to-noiseratio, high sensitivity, and linearity near null positions to the traditionalhigh-precision nulling system. The ellipsometric angles Delta and Psi areobtained by azimuth measurement of the analyzer and the polarizer-PEMsystem, for which the first and second harmonics of modulator frequencycross the zeros. We show that the null system is insensitive to ellipsometermisadjustment and component imperfections and modulator calibrationis not needed. In addition, a fast ellipsometer mode for fine changesmeasurement of ellipsometric angles is proposed. A new null ellipsometer is described that uses photoelasticmodulator (PEM). The phase modulation adds a good signal-to-noiseratio, high sensitivity, and linearity near null positions to the traditionalhigh-precision nulling system. The ellipsometric angles Delta and Psi areobtained by azimuth measurement of the analyzer and the polarizer-PEMsystem, for which the first and second harmonics of modulator frequencycross the zeros. We show that the null system is insensitive to ellipsometermisadjustment and component imperfections and modulator calibrationis not needed. In addition, a fast ellipsometer mode for fine changesmeasurement of ellipsometric angles is proposed. (en)
Title	Null ellipsometer with phase modulation Null ellipsometer with phase modulation (en) Nulovací elipsometr s fázovou modulací (cs)
skos:prefLabel	Null ellipsometer with phase modulation Null ellipsometer with phase modulation (en) Nulovací elipsometr s fázovou modulací (cs)
skos:notation	RIV/61989100:27350/04:00011069!RIV/2005/GA0/273505/N
http://linked.open.../vavai/riv/strany	6040-6045
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA202/03/0776), P(ME 508)
http://linked.open...iv/cisloPeriodika	12
http://linked.open...vai/riv/dodaniDat	2005
http://linked.open...aciTvurceVysledku	Postava, Kamil Pištora, Jaromír
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoká škola báňská - Technická univerzita Ostrava / Hornicko-geologická fakulta
http://linked.open...dnocenehoVysledku	576833
http://linked.open...ai/riv/idVysledku	RIV/61989100:27350/04:00011069
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	instrumentation, measurement, and metrology;ellipsometry and polarimetry;physical optics: ellipsometry and polarimetry (en)
http://linked.open.../riv/klicoveSlovo	instrumentation measurement ellipsometry and polarimetry physical optics: ellipsometry and polarimetry and metrology
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[566438EAAAD0]
http://linked.open...i/riv/nazevZdroje	Optics Express
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Magneto-optical effects in magnetic nanostructures http://linked.opendata.cz/resource/domain/vavai/projekt/ME%20508
http://linked.open...UplatneniVysledku	2004
http://linked.open...v/svazekPeriodika	24
http://linked.open...iv/tvurceVysledku	Pištora, Jaromír Postava, Kamil Maziewski, A. Yamaguchi, T. Višňovský, Š. Ossikowski, R.
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	27350

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